We present the Staggered Torsional Electrostatic Combdrive (STEC) fabrication process that creates thick mirrors with hightorque actuators, thereby allowing high-speed optical scanning with large angular deflections.We have demonstrated a 550 pmdiameter mirror capable of scanning an optical angle of 24.9" at its 34 kHz resonant frequency with less than 30 nm static and dynamic deformation.The optical resolution is 350 pixels -very near the diffraction-limited resolution of 355 pixels with 655 nm wavelength light.
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