Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Kiang, Meng-Hsiung; Solgaard, Olav; Lau, K.Y.; Muller, R.S.

doi:10.1109/84.661381

Cited by 125 publications

(22 citation statements)

References 15 publications

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“…Movable and stationary fingers are interdigitated for electrostatic force in the x direction but misaligned by a distance, s, between movable and stationary fingers in the y direction to generate an electrostatic force in the y direction. The electrostatic force between fingers of the conventional comb structures [1][2][3] is theoretically obtained from the derivative of the electric field energy stored between the comb fingers. However, theoretical electrostatic forces of the comb fingers positioned, as shown in figure 3, cannot be derived analytically because of nonlinear behavior to the misalignment, s. The electrostatic force f y on a pair of fingers of figure 3 is expressed from finite element analysis using a commercial code MAXWELL [12] as follows:…”

Section: Stationary Combmentioning

confidence: 99%

“…Micromirrors are basic components in many optical systems such as scanners, microscopes, interferometers and waveguides. Both bulk-and surface-micromachining technologies [1][2][3] have demonstrated the feasibilities and potential of using micromirrors in scanning devices such as bar-code reading, optical data storage, telecommunication and display due to the inherent small inertia and fast response of these micromirrors. In previous demonstrations, torsional micromirrors have been used to scan light in a single axial direction with high operation bias voltages of 40 [1], 18 [2], 75 [3] and 40 V [4], respectively, and it is desirable to lower the operating voltages of these microdevices.…”

Section: Introductionmentioning

confidence: 99%

“…Both bulk-and surface-micromachining technologies [1][2][3] have demonstrated the feasibilities and potential of using micromirrors in scanning devices such as bar-code reading, optical data storage, telecommunication and display due to the inherent small inertia and fast response of these micromirrors. In previous demonstrations, torsional micromirrors have been used to scan light in a single axial direction with high operation bias voltages of 40 [1], 18 [2], 75 [3] and 40 V [4], respectively, and it is desirable to lower the operating voltages of these microdevices. In the area of two-axial actuators/mirrors, previous works include monolithic 2D actuators by means of thermal actuation [5], electromagnetic actuation [6] and electrostatic actuation [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A surface-micromachined vertical scanning micromirror

Lee¹,

Lin

2007

J. Micromech. Microeng.

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A vertically supported, two-axial scanning micromirror with an optical reflection area of 600 µm × 600 µm has been successfully demonstrated using a 2 µm thick standard planar polysilicon surface micromachining process. The micromirror was lifted from the substrate and vertically supported by locking springs and hinges using a micromanipulator under a probe station. It was torsionally actuated in the two orthogonal angular directions including the first that is normal to the substrate and the second that is normal to the plane of the vertically supported microstructure. Furthermore, under an ac driving voltage of 2.5 V and dc bias voltage of 5 V, it was able to reflect and generate laser light patterns on a distant screen. The scanned and reflected laser light was able to make a circular pattern at f = 387 Hz, an elliptical pattern at f = 350 Hz and a line pattern at f = 427 Hz. As such, this surface-micromachined vertical mirror system could have potential applications for an optical bench on a chip.

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Section: Stationary Combmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A surface-micromachined vertical scanning micromirror

Lee¹,

Lin

2007

J. Micromech. Microeng.

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“…For example, surface micromachining technology has been extensively exploited to implement micro 3 Author to whom any correspondence should be addressed. scanners [8][9][10]. However, additional mechanical structures, actuators and micro assembly techniques are required to improve the moving space.…”

Section: Introductionmentioning

confidence: 99%

Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner

Tang

Hsu

Chen

et al. 2010

J. Micromech. Microeng.

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This study demonstrates the torque-enhancement design for a 2-axis magnetostatic SOI scanner driven by a double-side electroplating ferromagnetic film. The present design has two merits: (1) the slender ferromagnetic material patterns with higher length-to-width ratio enhance the magnetization, (2) the backside electroplating of the ferromagnetic film increases the volume of the ferromagnetic materials. This study also establishes the fabrication processes to implement the proposed design. The processes also have two merits: (1) the handle-layer of the SOI wafer is exploited as the shadow mask to pattern the seed-layer at the backside of the device layer, (2) the device layer of the SOI wafer acts as the cathode to enable simultaneous double-side electroplating. In applications, a 2-axis SOI scanner was implemented and characterized. Measurements show a 149% torque enhancement from the double-side electroplating design. The vertical slender ferromagnetic material patterns further increase the magnetostatic torque to 211%. This study also successfully demonstrates the Lissajous scanning using the presented 2-axis SOI scanner.

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“…Sub-gigahertz beam switching of vertical-cavity surface-emitting laser with transverse coupled cavity M. Nakahama, 1 X. Gu, 1 T. Sakaguchi, 1 A. Matsutani, 2 M. Ahmed, 3 A. Bakry, 3 We report a high-speed electrical beam switching of vertical cavity surface emitting laser with a transverse coupled cavity. A high speed (sub-gigahertz) and large deflection angle (>30 ) beam switching is demonstrated by employing the transverse mode switching.…”

mentioning

confidence: 98%

Sub-gigahertz beam switching of vertical-cavity surface-emitting laser with transverse coupled cavity

Nakahama

Sakaguchi

et al. 2015

Applied Physics Letters

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We report a high-speed electrical beam switching of vertical cavity surface emitting laser with a transverse coupled cavity. A high speed (sub-gigahertz) and large deflection angle (>30°) beam switching is demonstrated by employing the transverse mode switching. The angular switching speed of 900 MHz is achieved with narrow beam divergence of below 4° and extinction ratio of 8 dB. We also measured the near- and far-field patterns to clarify the origin of the beam switching. We present a simple one-dimensional Bragg reflector waveguide model, which well predicts the beam switching characteristic.

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Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Cited by 125 publications

References 15 publications

A surface-micromachined vertical scanning micromirror

A surface-micromachined vertical scanning micromirror

Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner

Sub-gigahertz beam switching of vertical-cavity surface-emitting laser with transverse coupled cavity

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