Linear microvibromotor for positioning optical components

Daneman, M.; Tien, Norman C.; Solgaard, Olav; Pisano, Albert P.; Lau, K.Y.; Muller, R.S.

doi:10.1109/84.536622

Cited by 77 publications

(39 citation statements)

References 6 publications

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“…As a result, the new microgripper can move anywhere by the way of electrical driving which is similar to that described in Ref. 3. Some results would be published in near future.…”

Section: Potential Applicationsupporting

confidence: 60%

Forming conditions and neural network control of continuously directional microstructure in directional solidification continuous casting process

Peng

Xie-min

Kuangdi

1999

J. of Shanghai Univ.

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Successful implementation of simple mechanism on silicon chip is a prerequisite for monolithic microrobotic systems. This paper describes the integrated fabrication of polycrystalline silicon microgripper. Link, fixed and active joint, and sliding flange structures with dimensions of micrometers have been fabricated on the substrate of monocrystalline silicon using silicon microfabrication technology. This microgripper, which may be applied to transducers or sensors, can be batch-fabricated in IC-compatible process. The movable mechanical elements are built on layers that are later removed, so that they are free for translation and rotation. Under external driving, a microgripper cut from substrate would he able to catch tiny filament or small particle with dimension of 10--200 micrometers.

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“…As a result, the new microgripper can move anywhere by the way of electrical driving which is similar to that described in Ref. 3. Some results would be published in near future.…”

Section: Potential Applicationsupporting

confidence: 60%

Forming conditions and neural network control of continuously directional microstructure in directional solidification continuous casting process

Peng

Xie-min

Kuangdi

1999

J. of Shanghai Univ.

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“…Many other microactuators have been proposed and studied in order to realize movable structures. Those that are commonly used in silicon MEMS technology are: comb drive actuators [1], operated by the electrostatic force between a pair of interdigitated movable and fixed combs; linear microvibromotors [2] that use impact actuation to obtain large motion from small-displacement resonant structures such as comb drive actuators; stepper motors [3] that can achieve large force and large displacement; micro-engines [4], fabricated by Sandia National Laboratory, operated by orthogonal pistons connected to a crank shaft, in a similar way to an internal combustion engine; and electro-thermal actuators [5] that provide a large force, but a very small deflection.…”

Section: Introductionmentioning

confidence: 99%

The Increase of the Native Oxide Thickness on H-Terminated Si Surfaces by Gaseous Contamination in a Clean Room Atmosphere

Itoga

Kojima

Yugami

et al. 1997

Jpn. J. Appl. Phys.

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Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three-and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 µN from a one-plate SDA and 850 µN from a four-plate SDA.

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“…Resonators have been widely used as a key component in MEMS devices, such as in micro-gyroscopes[ 1,2,3], microvibromotors [4], micro-enginesC.51, and microwave systems [6].…”

Section: Introductionmentioning

confidence: 99%

MEMS resonators that are robust to process-induced feature width variations

Liu

Paden

Turner

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)

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In this paper, a frequency stability analysis and design method for MEMS resonators is presented. The frequency characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on the sidewall of the structure being considered, the first and second order frequency sensitivities to the fabrication error are derived. A simple relationship between the proof mass area and perimeter, and the beam width, is developed for single material structures, which expresses that the proof mass perimeter times the beam width should equal six times the area of the proof mass. Design examples are given for the single material and multi-layer structures. The results and principles presented in the paper can be used to analyze and design other MEMS resonators.

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Linear microvibromotor for positioning optical components

Cited by 77 publications

References 6 publications

Forming conditions and neural network control of continuously directional microstructure in directional solidification continuous casting process

Forming conditions and neural network control of continuously directional microstructure in directional solidification continuous casting process

The Increase of the Native Oxide Thickness on H-Terminated Si Surfaces by Gaseous Contamination in a Clean Room Atmosphere

MEMS resonators that are robust to process-induced feature width variations

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