Abstract:Successful implementation of simple mechanism on silicon chip is a prerequisite for monolithic microrobotic systems. This paper describes the integrated fabrication of polycrystalline silicon microgripper. Link, fixed and active joint, and sliding flange structures with dimensions of micrometers have been fabricated on the substrate of monocrystalline silicon using silicon microfabrication technology. This microgripper, which may be applied to transducers or sensors, can be batch-fabricated in IC-compatible pr… Show more
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