We have studied new abrupt-source-relaxed/strained semiconductor-heterojunction structures for quasi-ballistic complementary metal-oxidesemiconductor (CMOS) devices, by locally controlling the strain of a single strained semiconductor. Appling O þ ion implantation recoil energy to the strained semiconductor/buried oxide interface, Raman analysis of the strained layers indicates that we have successfully relaxed both strained-Si-on-insulator (SSOI) substrates for n-MOS and SiGe-on-insulator (SGOI) substrates for p-MOS without polycrystallizing the semiconductor layers, by optimizing O þ ion implantation conditions. As a result, it is considered that the source conduction and valence band offsets ÁE C and ÁE V can be realized by the energy difference in the source Si/channel-strained Si and the source-relaxed SiGe/channelstrained SiGe layers, respectively. The device simulator, considering the tunneling effects at the source heterojunction, shows that the transconductance of sub-10 nm source heterojunction MOS transistors (SHOT) continues to increase with increasing ÁE C. Therefore, SHOT structures with the novel source heterojunction are very promising for future quasi-ballistic CMOS devices.

Recently updated nanocrystalline soft magnetic Fe-Co-Si-B-P-Cu alloys “NANOMET®” exhibit high saturation magnetic flux density (Bs > 1.8 T), low coercivity (Hc < 10 A/m) and low core loss (W1.7/50 ∼ 0.4 W/kg) even in a ribbon form with a thickness of up to 40 μm. By utilize excellent magnetic softness, several products such as motors or transformers for electrical appliances are now under developing by industry-academia collaboration. In particular, it is found that a brushless DC motor using NANOMET® core exhibited remarkable improvement in energy consumption. The prototype motor with an outer core diameter of 70 mm and a core thickness of 50 mm was constructed using laminated nano-crystallized NANOMET® ribbons. Core-loss for the constructed motor was improved from 1.4 W to 0.4 W only by replacing the non-oriented Si-steel core with NANOMET® one. The overall motor efficiency is evaluated to be 3% improvement. In this work, the relation between processing and resulting magnetic properties will be presented. In addition, feasibility for commercialization will also be discussed.

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