-The ion flux from vacuum arc cathode spots was measured in two vacuum arc systems. The first was a vacuum arc ion source which was modified allowing us to collect ions from arc plasma streaming through an anode mesh. The second discharge system essentially consisted of a cathode placed near the center of a spherically shaped mesh anode. In both systems, the ion current streaming through the mesh was measured by a biased collector. The mesh anodes had geometric transmittances of 60% and 72%, respectively, which were taken into account as correction factors. The ion current from different cathode materials was measured for 50-500 A of arc current. The ion current normalized by the arc current was found to depend on the cathode material, with values in the range from 5% to 19%. The normalized ion current was generally greater for elements of low cohesive energy. The ion erosion rates were determined from values of ion current and ion charge states, which were previously measured in the same ion source. The absolute ion erosion rates ranged from 16-173 µg/C.

This paper presents the results of time-of-flight mass spectrometry studies of the elemental and mass-to-charge state compositions of metal ion beams produced by a vacuum arc ion source with compound cathode (WC-Co(0.5), Cu-Cr(0.25), Ti-Cu(0.1)). We found that the ion beam composition agrees well with the stoichiometric composition of the cathode material from which the beam is derived, and the maximum ion charge state of the different plasma components is determined by the ionization capability of electrons within the cathode spot plasma, which is common to all components. The beam mass-to-charge state spectrum from a compound cathode features a greater fraction of multiply charged ions for those materials with lower electron temperature in the vacuum arc cathode spot, and a smaller fraction for those with higher electron temperature within the spot. We propose a potential diagram method for determination of attainable ion charge states for all components of the compound cathodes.

The total ion current generated by a vacuum arc plasma source was measured. The discharge system investigated allowed ion collection from the arc plasma streaming through a hemispherical mesh anode with geometric transparency of 72%. A range of different cathode materials was investigated, and the arc current was varied over the range 50-500 A. We find that the normalized ion current (I ion /I arc ) depends on the cathode material, with values in the range from 5% to 19% and generally greater for elements of low cohesive energy. The application of a strong axial magnetic field in the cathode and arc region leads to increased normalized ion current, but only by virtue of enhanced ion charge states formed in a strong magnetic field.

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