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LiTi y Co 1-y O 2 (y=0, 0.02, 0.05, 0.1) thin films were deposited on metalized Si substrates using RF magnetron sputtering technique. The films were deposited at a substrate temperature of 250°C with subsequent annealing at 600°C for 3 h in controlled oxygen environment. The films exhibited predominant (003), (101), and (104) orientations representing single-phase hexagonal structure with R3m space group. Two well-defined Raman peaks observed at 489 and 598 cm −1 corresponding to E g and A 1g modes confirm the hexagonal layered structure. The grain size and grain distribution were observed using atomic force microscopy. The cyclic voltammetry studies on Pt//LiTi y Co 1-y O 2 film cathodes in aqueous region exhibited perfect redox peaks at expected potentials. The Pt//LiTi 0.02 Co 0.98 O 2 film cathode exhibited better discharge capacity of about 65 μA h cm −2 μm −1 with good cycling stability compared to pure Pt//LiCoO 2 . The electrochemical impedance analysis revealed a lower charge transfer resistance in Ti doped LiCoO 2 film cathode, resulting better discharge capacity.

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