Articles you may be interested inDependence of selectivity on plasma conditions in selective etching in submicrometer pitch grating on InP surface by CH4/H2 reactive ion etching J. Appl. Phys. 109, 073516 (2011); 10.1063/1.3573536 High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers Appl. Phys. Lett. 92, 171102 (2008); 10.1063/1.2917452 Reactive-ion etching of high-Q and submicron-diameter Ga As ∕ Al As micropillar cavities J. Vac. Sci. Technol. B 23, 2499 (2005); 10.1116/1.2131084High-Q photonic crystal microcavities fabricated in a thin GaAs membrane CH 4 -based InP dry etching techniques have been investigated by using electron cyclotron resonance etching and reactive ion etching ͑RIE͒ methods to obtain microdisk and ring structures having smooth, vertical sidewalls, and specular etched surfaces. The RIE method is chosen for the device etch process owing to the higher perfection of the surfaces generated by this process. Excess CH 4 introduced in the InP RIE process was found to generate excessive polymers and resulted in sloped, rough sidewalls. A multistep RIE process involving a high-pressure ͑75 mTorr͒ condition, followed by a lower pressure ͑15 mTorr͒ etching to the completion of the structure was developed that leads to very smooth sidewalls. This process was successfully utilized in the fabrication of vertically coupled microdisk resonators.
Abstract-The authors demonstrate all epitaxial semiconductor microring resonators vertically coupled to buried heterostructure (BH) bus waveguides for the first time. Planar vertically stacked waveguides are successfully grown on BH mesas by conducting a two-step regrowth process. This approach is potentially important for any buried waveguide technology where subsequent surface planarity is required. The measured transmission spectra show resonance dips (1.55 1.60) m with quality factors, extinction ratios, and free spectral ranges of 2500 3.5 dB, and 11 nm, respectively, for 10-m-radii microrings.Index Terms-Buried heterostructure (BH), epitaxial regrowth, extinction ratio, free spectral range, microresonator, microring, quality factor.
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