Low-temperature ( 500°C) growth of YBa2Cu3O
x
films by metaloganic chemical vapor deposition on (100)MgO substrates using N2O as an oxidizing agent has been investigated. Films 12 unit cells thick show superconducting onset critical temperature of 89 K and zero-resistivity critical temperature of 80 K. Films 4 unit cells thick show T
c (zero) of 30 K. Films as thin as 3 unit cells thick reveal superconducting onset characteristics. If the topmost (cap) layer and the bottom (buffer) layer are nonsuperconducting, this result suggests that superconductivity arises even from monomolecular layer of YBa2Cu3O
x
.
Low-temperature growth of YBa2Cu3Ox films by metalorganic chemical vapor deposition using N2O as an oxidizing agent has been investigated. We have deposited superconducting YBa2Cu3Ox on (100)MgO substrates at 500°C for the first time. Films of 15nm-thick show zero-resistivity critical temperature of 80K. Films of as thin as three unit-cell-thick reveal the superconducting onset characteristics. This result suggests that superconductivity is arisen even from effectively monomolecular layer of YBa2Cu3Ox when we take into account monomolecular buffer layer and monomolecular cap layer. YBa2Cu3Ox films of 9nm-thick grown on (100)SrTiO3 at 600°C with Tc(zero) of 79K and with peak to valley roughness fluctuation of two unit-cell have been obtained.
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