Superconducting Properties of Ultrathin Films of YBa2Cu3Ox Prepared by Metalorganic Chemical Vapor Deposition at 500°C

Zama, Hideaki; Saga, Jun; Hattori, Takeo; Oda, Shunri

doi:10.1143/jjap.33.l312

Cited by 13 publications

(5 citation statements)

References 12 publications

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“…Although we obtained by the MOMBE c-axis thin films at lower growth temperatures than, e.g., for MOCVD growth using [1], the use of or in MOMBE has not produced any distinct changes in the growth and quality of the c-axis films. This is in contradiction with Zama et al [5] promoting the idea that the source precursor is the origin of record low temperature growth of 500 when using the same precursors. But, the growth technique and growth conditions were different from ours.…”

Section: Resultscontrasting

confidence: 69%

“…In the literature, growth of Y-Ba-Cu-O is performed at temperatures as low as 400-600 for c-axis oriented thin films, but as noted in the review by Leskala et al [4] these films are usually not superconducting and requires post-annealing at high temperatures (usually above 750 ). However, Zama et al [5] obtained c-axis (Y123) superconducting thin films for a growth temperature of 500 using MOCVD deposition in a atmosphere and subsequent post-annealing in at 400 . The authors indicated that they took advantage of the supposed enhanced surface migration of the MO source precursors at low growth temperatures.…”

Section: Introductionmentioning

confidence: 99%

“…In this work we present the results on the MOMBE growth of Y123 thin films with different orientations on substrates. To get a better understanding of the low temperature deposition processes suggested by Zama et al [5], we used ( , ) instead of [6], which was the same precursor used by Zama et al [5].…”

Section: Introductionmentioning

confidence: 99%

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MOMBE Growth of ${\rm YBa}_{2}{\rm Cu}_{3}{\rm O}_{7}$ Thin Films With c-Axis, a-Axis and (103/110) Orientations on ${\rm SrTiO}_{3}$ Substrate

Endo

Badica

Uehara

et al. 2011

IEEE Trans. Appl. Supercond.

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Superconducting Y123 thin films with (001), (100/010) and (103/110) orientations were obtained by molecular-organic-source MBE (MOMBE) for optimum growth temperatures of 600, 515 and 600 C, respectively, using a Ba(DPM) 2 (phen)2 source material and ozone atmosphere. Superconductivity was obtained without post processing. According to the literature, use of a Ba(DPM) 2 (phen) 2 precursor was expected to yield a lower optimum growth temperature, but there were no significant differences between the use of this source and a Ba(DPM) 2 precursor. For our c-axis oriented Y123 film, the optimum growth temperature was higher than the reported record-low growth temperature (500 C by MOCVD using Ba(DPM) 2 (phen) 2 ) but it was lower than the values for other growth techniques. This can have a positive impact on fabrication of layered devices or integration through the decrease of inter-diffusion between the layers. Results also suggest that processes are complex and other details than the source type should be carefully considered.Index Terms-MOMBE, thin films, Y123, (001), (100) and (103/ 110) orientations.

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Section: Resultscontrasting

confidence: 69%

Section: Introductionmentioning

confidence: 99%

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MOMBE Growth of ${\rm YBa}_{2}{\rm Cu}_{3}{\rm O}_{7}$ Thin Films With c-Axis, a-Axis and (103/110) Orientations on ${\rm SrTiO}_{3}$ Substrate

Endo

Badica

Uehara

et al. 2011

IEEE Trans. Appl. Supercond.

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“…The problem is that the vaporization temperature is very close to the decomposition temperature of the precursors. [24] Oligomer formation was prevented by adducts, and decomposition was minimized by using a reduced vaporization temperature. In order to prevent oligomer formation, both the use of adducts, and water-free synthesis of the precursor, have been proposed and demonstrated.…”

Section: Design Of Metal±organic Precursorsmentioning

confidence: 99%

Atomic Layer-by-Layer MOCVD of Complex Metal Oxides and In Situ Process Monitoring

Yamamoto

Oda²

2001

Chem. Vap. Deposition

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The progress of atomic layer-by-layer metal±organic (MO) CVD of complex metal oxides and related growth technologies is reviewed. Atomic layer-by-layer MOCVD produces thin films of complex metal oxides that are of high crystalline quality, with a very smooth surface. These features allow us to fabricate modulated structures on an atomic scale, such as d-doping, superlattice structure, and heterostructures. A common problem of oxide MOCVD is poor controllability of the growth conditions, mainly caused by instability of precursor supply. To overcome this problem, new precursors have been developed, and in situ process monitoring, using an ultrasonic transducer and spectroscopic ellipsometry, is applied during the MOCVD process. The reproducibility of MOCVD growth has been improved significantly.

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“…[6]) reveals that a deposition temperature of at least 700~ is generally needed to obtain the superconducting YBa2Cu307_ x phase in situ. A recent paper has even reported MOCVD of superconducting films at as low temperature as 500~ using N20 [11]. First, it has been observed that by using plasma-activated CVD, the superconducting compound can be obtained at a lower temperature.…”

Section: Introductionmentioning

confidence: 99%

Thermodynamic modelling of CVD of high-T c superconductors

Hårsta

1997

Journal of Thermal Analysis

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Thermodynamic modelling of CVD of the superconducting phases in the Y-Ba--Cu--O and Bi-Sr-Ca-Cu-O systems is reviewed. Both MOCVD and halide CVD are considered. The resuits are discussed in terms of calculated CVD stability diagrams. The influence of deposition parameters, including selection of precursors, on the existence and extension on those stability regions, where the superconducting phases can be deposited, is described. The results of the thermodynamic modelling are compared with experimental investigations. The agreement between thermodynamics and experiments is satisfactory, indicating that thermodynamic modelling can be used as a guide to predict the optimum deposition conditions.

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Superconducting Properties of Ultrathin Films of YBa₂Cu₃O_x Prepared by Metalorganic Chemical Vapor Deposition at 500°C

Cited by 13 publications

References 12 publications

MOMBE Growth of ${\rm YBa}_{2}{\rm Cu}_{3}{\rm O}_{7}$ Thin Films With c-Axis, a-Axis and (103/110) Orientations on ${\rm SrTiO}_{3}$ Substrate

MOMBE Growth of ${\rm YBa}_{2}{\rm Cu}_{3}{\rm O}_{7}$ Thin Films With c-Axis, a-Axis and (103/110) Orientations on ${\rm SrTiO}_{3}$ Substrate

Atomic Layer-by-Layer MOCVD of Complex Metal Oxides and In Situ Process Monitoring

Thermodynamic modelling of CVD of high-T c superconductors

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