Transparent conductive strontium copper oxide (SCO) films were grown on glass substrates by radio frequency magnetron sputtering technique at room temperature with different oxygen partial pressures. Structural, electrical and optical properties of these films were studied. Grazing incidence angle x-ray diffraction (GIAXRD) analysis showed that SrCu 2 O 2 structure was achieved when oxygen partial pressure was raised above 2:0 Â 10 À1 Pa. Both carrier density and resistivity of the film varied with oxygen partial pressure. The carrier density and resistivity of the film prepared with 4:0 Â 10 À1 Pa of oxygen pressure were 2:89 Â 10 21 cm À3 and 6:64 Â 10 À2 Ácm, respectively. The carrier mobility was 0.092 cm 2 V À1 s À1 and the Hall coefficient measured at room temperature indicated that the conduction is p-type. The optical transmittance in the visible range at 550 nm was 29%$41%.

Electrical, structural and optical properties of annealed transparent strontium copper oxide (SCO) films were studied in this paper. These SCO films were first deposited by reactive radio frequency magnetron sputtering technique on glass substrates at room temperature with ultra highly pure oxygen and a 100 W sputtering power, and then annealed at different temperatures ranging from 373 to 723 K in an atmosphere of oxygen controlled at 101 Pa. Results showed that the resistivity increased first as the annealing temperature raised from 373 to 473 K, and then decreased when annealed at 623 K. Carrier density of an annealed film increased from 7:09 Â 10 20 cm À3 to 1:21 Â 10 21 cm À3 as the annealing temperature increased. Results also showed that the resistivity of a SCO film was highly correlated to the carrier mobility. The highest carrier mobility observed by annealing a SCO film at 623 K was 4:0 Â 10 À5 m 2 V À1 S À1 . The optical transmittance of an annealed SCO film in the visible range at 550 nm fell between 52.6% and 58.2%. The Hall coefficient measured at room temperature indicated the nature of the annealed films was p-type.