Effects of Annealing Temperature on the Properties of Strontium Copper Oxide Prepared by Radio Frequency Reactive Magnetron Sputtering Method

Abstract

Electrical, structural and optical properties of annealed transparent strontium copper oxide (SCO) films were studied in this paper. These SCO films were first deposited by reactive radio frequency magnetron sputtering technique on glass substrates at room temperature with ultra highly pure oxygen and a 100 W sputtering power, and then annealed at different temperatures ranging from 373 to 723 K in an atmosphere of oxygen controlled at 101 Pa. Results showed that the resistivity increased first as the annealing temperature raised from 373 to 473 K, and then decreased when annealed at 623 K. Carrier density of an annealed film increased from 7:09 Â 10 20 cm À3 to 1:21 Â 10 21 cm À3 as the annealing temperature increased. Results also showed that the resistivity of a SCO film was highly correlated to the carrier mobility. The highest carrier mobility observed by annealing a SCO film at 623 K was 4:0 Â 10 À5 m 2 V À1 S À1 . The optical transmittance of an annealed SCO film in the visible range at 550 nm fell between 52.6% and 58.2%. The Hall coefficient measured at room temperature indicated the nature of the annealed films was p-type.

Effect of thermal annealing on electrical and optical properties of Ba-doped SrCu2 O2 thin films on glass substrates

“…The presence of CuO in the film results in a decrease of the SCO chemical purity on one hand, and a degradation of the optical transparency of the film on the other hand. It is to be noticed that, when successful, conventional annealing of 5 min at 650 8C is very interesting in comparison with annealing times of several hours reported in literature to obtain the SCO phase [5,22,31,33,34]. Such a short time reduces the processing cost.…”