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This article describes an automated evaluation method for the chirp standard. Chirp calibration standards provide a way to describe the transfer behavior of different spatial frequencies as they contain sinusoidal functions of varying wavelengths (Krüger-Sehm et al 2007 chirp calibration standards for surface measuring instruments Tech. Mess. tm 74 572-76; Pehnelt et al 2011 Comparative analysis of optical surface measuring systems with a chip calibration standard Tech. Mess. tm 78 457-62). By introducing a new, automated evaluation method, an improvement for the application of the chirp standard can be achieved. The data-preprocessing for topography and profile measurement data and the fit of the geometric elements are described. Automated evaluation can reduce the labor required to evaluate measured data and make it easier to compare different evaluations in the course of standardization. The algorithm can be used to characterize the so-called 'small scale fidelity' of an optical instrument. The term 'small scale fidelity' is currently discussed in the optical group of working group no. 16 of the ISO technical committee 213.

Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.

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