The demonstration of vertical GaN wrap-around gated field-effect transistors using GaN nanowires is reported. The nanowires with smooth a-plane sidewalls have hexagonal geometry made by top-down etching. A 7-nanowire transistor exhibits enhancement mode operation with threshold voltage of 1.2 V, on/off current ratio as high as 108, and subthreshold slope as small as 68 mV/dec. Although there is space charge limited current behavior at small source-drain voltages (Vds), the drain current (Id) and transconductance (gm) reach up to 314 mA/mm and 125 mS/mm, respectively, when normalized with hexagonal nanowire circumference. The measured breakdown voltage is around 140 V. This vertical approach provides a way to next-generation GaN-based power devices.
3D single-crystalline, well-aligned GaN-InGaN rod arrays are fabricated by selective area growth (SAG) metal-organic vapor phase epitaxy (MOVPE) for visible-light water splitting. Epitaxial InGaN layer grows successfully on 3D GaN rods to minimize defects within the GaN-InGaN heterojunctions. The indium concentration (In ∼ 0.30 ± 0.04) is rather homogeneous in InGaN shells along the radial and longitudinal directions. The growing strategy allows us to tune the band gap of the InGaN layer in order to match the visible absorption with the solar spectrum as well as to align the semiconductor bands close to the water redox potentials to achieve high efficiency. The relation between structure, surface, and photoelectrochemical property of GaN-InGaN is explored by transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), Auger electron spectroscopy (AES), current-voltage, and open circuit potential (OCP) measurements. The epitaxial GaN-InGaN interface, pseudomorphic InGaN thin films, homogeneous and suitable indium concentration and defined surface orientation are properties demanded for systematic study and efficient photoanodes based on III-nitride heterojunctions.
850 1090A uniform array of gallium nitride core-shell microrod (MR) lightemitting diode (LED) structures was grown by metalorganic vapor phase epitaxy. Defects and the quantum well (QW) luminescence in an individual rod were investigated by scanning tunneling electron microscopy (STEM) and STEM cathodoluminescence. Luminescence with different wavelength was detected from the quantum wells on the semipolar tip facets and the nonpolar sidewalls of the MRs. Furthermore, the MR array is processed into LED chips. The electro-optical characteristics of the devices are analyzed. Two separate emission bands are distinguished, which are attributed to the QWs on the semipolar tip facets and the nonpolar sidewalls, respectively. To obtain white LEDs, micrograin phosphors were developed which fit in between individual MRs. By using electrophoretic particle deposition, these phosphors are deposited onto the MR LED chips. Color coordinates, color temperature, and device efficiency are evaluated.Blue (top) and phosphor-converted white (bottom) microrod LEDs on 4 00 wafer.
Articles you may be interested inReal-time x-ray studies of crystal growth modes during metal-organic vapor phase epitaxy of GaN on c-and mplane single crystals Appl. Phys. Lett. 105, 051602 (2014); 10.1063/1.4892349Surface diffusion and layer morphology of ( ( 11 2 ¯ 2 ) ) GaN grown by metal-organic vapor phase epitaxyIn situ spectroscopic ellipsometry study of GaN nucleation layer growth and annealing on sapphire in metalorganic vapor-phase epitaxy J. Appl. Phys. 98, 033522 (2005);Three-dimensional GaN columns recently have attracted a lot of attention as the potential basis for core-shell light emitting diodes for future solid state lighting. In this study, the fundamental insights into growth kinetics and mass transport mechanisms of N-polar GaN columns during selective area metal organic vapor phase epitaxy on patterned SiO x /sapphire templates are systematically investigated using various pitch of apertures, growth time, and silane flow. Species impingement fluxes on the top surface of columns J top and on their sidewall J sw , as well as, the diffusion flux from the substrate J sub contribute to the growth of the GaN columns. The vertical and lateral growth rates devoted by J top , J sw and J sub are estimated quantitatively. The diffusion length of species on the SiO x mask surface k sub as well as on the sidewall surfaces of the 3D columns k sw are determined. The influences of silane on the growth kinetics are discussed. A growth model is developed for this selective area metal organic vapor phase epitaxy processing. V C 2014 AIP Publishing LLC. [http://dx.
The three-dimensional growth of GaN structures as a basis for the fabrication of 3D GaN core-shell LEDs has attracted substantial attention in the past few years. GaN nanorods or microrods with high aspect ratios can be grown by selective area epitaxy on a GaN buffer through a SiO x mask. It has been found earlier that silane substantially initiates vertical growth, with the exact underlying mechanisms being still unclear. Here, the influence of silane on the 3D GaN column growth was investigated by performing detailed growth experiments in combination with a thorough surface analysis in order to get insight into these mechanisms. The vertical growth rate is significantly enhanced by high silane fluxes, whereas the saturation of growth rate with the time is reduced. Thus, homogenous GaN columns with an aspect ratio of more than 35 could be achieved. A thin Si-rich layer on the non-polar m-plane facets of the columns has been detected using a combination of transmission electron microscopy, energy dispersive X-ray spectroscopy and Auger electron spectroscopy. This layer is suggested to be the reason for the increase in growth rate, modifying the effective collection range of the species along the sidewalls, and preventing the lateral growth.
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