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Modern technology depends on materials with precisely controlled properties. Ion beams are a favoured method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams are used to modify the mechanical, tribological and chemical properties of metal, intermetallic and ceramic materials without altering their bulk properties. Ion–solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion–solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering and material science issues associated with metastable phase synthesis.

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The beneficial roles energetic ions play in thin film vacuum processes have long been recognized by the vacuum coating community. Optical coaters were among the first to adopt the process in the form of concurrent, low energy, directed ion beam bombardment of physical vapor deposition [electron beam] coatings for producing dense, adherent, robust, and environmentally resistant optical coatings. The international research and development community has also been actively pursuing the study of ion beam assisted deposition (IBAD) for both studying the mechanisms of ion/solid interactions during thin film growth as well as for developing coating protocols for specific application areas, including: tribological coatings, anti-corrosion coatings, optical coatings, superconducting buffer layers and coatings for temperature sensitive substrates such as polymers. This paper will review selected areas of this active field and will attempt to identify emerging application areas.

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