Ion beam assisted thin film deposition

Hirvonen, James K.

doi:10.1016/0920-2307(91)90008-b

Cited by 159 publications

(55 citation statements)

References 96 publications

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“…It has been found that the Al 2 O 3 layer deposited by the IBAD technique was mostly amorphous and denser than those deposited by other techniques. [23,24] This dense buffer layer may help with the deposition of a more uniform Fe film by increasing the wettability of Fe on its surface, [25] preventing the interdiffusion between the Fe film and the substrate, [18,26] and controlling the formation of catalyst particles during the CNT growth. [27] In order to achieve a high growth rate while maintaining a long catalyst lifetime, we investigated the effect of the temperature on CNT growth rate of arrays.…”

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confidence: 98%

Sustained Growth of Ultralong Carbon Nanotube Arrays for Fiber Spinning

et al. 2006

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Arrays of well‐aligned, ca. 4.7 mm long carbon nanotubes (CNTs) are grown in a simple, safe, and cost‐effective manner using an efficient Al2O3/Fe catalyst prepared by an ion‐beam assisted deposition technique (see figure). Importantly, the as‐synthesized CNT arrays with lengths ranging from 500 μm to 1.5 mm are conducive to spinning, and CNT fibers spun from such long CNT arrays show remarkably improved tensile strength.

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confidence: 98%

Sustained Growth of Ultralong Carbon Nanotube Arrays for Fiber Spinning

et al. 2006

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“…For reviews, see Smidt 25 and Hirvonen. 26 In this section we consider THDS analysis of Cu thin films ͑200 Å͒ deposited with 250 eV Ar + assistance on poly-Mo at room temperature. Figure 11͑a͒ shows the normalized helium desorption spectra for Ar + /Cu ͑ion/atom͒ deposition ratios as shown for a 100 eV helium implantation fluence of 8.26 ϫ 10 13 He + /cm 2 .…”

Section: G Effect Of Ion Bombardment During Depositionmentioning

confidence: 99%

“…In order to consider specific technological applications as well, we have also applied THDS to Cu films fabricated by 250 eV argon-ion-beam-assisted deposition ͑IBAD͒. 5,6 In earlier work, defects in ion-implanted Cu single crystals have been explored by THDS. 7,8 Some properties of Cu films deposited by IBAD have been reported, [9][10][11] where the substrates were Si, Si/ SiO 2 , SiO 2 , 9,10 and SiN x / SiO 2 -coated Si.…”

Section: Introductionmentioning

confidence: 99%

Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry

Venugopal

Seijbel

Thijsse

2005

Journal of Applied Physics

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Thermal helium desorption spectrometry ͑THDS͒ has been used for the investigation of defects and thermal stability of thin Cu films ͑5 -200 Å͒ deposited on a polycrystalline Mo substrate in ultrahigh vacuum. These films are metastable at room temperature. On heating, the films transform into islands, giving rise to a relatively broad peak in the helium desorption spectra. The temperature of this island formation is dependent on film thickness, being 417 K for 10 Å and 1100 K for a 200 Å film. The activation energy for island formation was found to be 0.3± 0.1 eV for 75 Å film. Grain boundaries have a strong effect on island formation. The defect concentration in the as-deposited films is ϳ5 ϫ 10 −4 , for films thicker than 50 Å and more for thinner films. Helium release from monovacancies was identified in the case of a 200 Å film. Helium release was also seen during sublimation of the Cu film ͑ϳ1350 K͒. Overlayer experiments were used to identify helium trapped close to the film surface. An increase of the substrate temperature during deposition resulted in a film that had already formed islands. Argon-ion assistance ͑250 eV͒ during film deposition with an ion/atom ratio of ϳ0.1 resulted in a significant enhancement of helium trapping in the films. The argon concentration in the films was found to be 10 −3 . The temperature of island formation was increased due to argon-ion assistance. The helium and argon desorption spectra are found to be similar, which is due to most of the helium becoming trapped in the defects created by the argon beam. The role of the Mo surface in affecting the defects at the film-substrate interface is investigated. The effect of variation of helium fluence and helium implantation energy is also considered. The present THDS results of Cu/poly-Mo are compared to those of Cu/ Mo͑100͒ and Cu/ Mo͑100͒ reported earlier.

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“…Different properties of grown thin films depend directly on the microstructure of the thin film, which can vary for different deposition methods and deposition parameters, namely, deposition rate, substrate temperature, ratio of ions to neutral atoms and the amount of contamination. Therefore, thin films can be grown with different nano-structures, crystallographic orientations and chemical compositions [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Deposition of magnesium nitride thin films on stainless steel-304 substrates by using a plasma focus device

2014

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In this research, for the first time, we synthesize magnesium nitride thin films on 304-type stainless steel substrates using a Mather-type (2 kJ) plasma focus (PF) device. The films of magnesium nitride are coated with different number of focus shots (like 15, 25 and 35) at a distance of 8 cm from the anode tip and at 0°angular position with respect to the anode axis. For investigation of the structural properties and surface morphology of magnesium nitride films, we utilized the X-ray diffractometer (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) analysis, respectively. Also, the elemental composition is characterized by energy-dispersive X-ray (EDX) analysis. Furthermore, Vicker ' s microhardness is used to study the mechanical properties of the deposited films. The results show that the degree of crystallinity of deposited thin films (from XRD), the average size of particles and surface roughness (from AFM), crystalline growth of structures (from SEM) and the hardness values of the films depend on the number of focus shots. The EDX analysis demonstrates the existence of the elemental composition of magnesium in the deposited samples.

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Ion beam assisted thin film deposition

Cited by 159 publications

References 96 publications

Sustained Growth of Ultralong Carbon Nanotube Arrays for Fiber Spinning

Sustained Growth of Ultralong Carbon Nanotube Arrays for Fiber Spinning

Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry

Deposition of magnesium nitride thin films on stainless steel-304 substrates by using a plasma focus device

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