The congruent vaporization of Sc(tmhd) 3 was verified from the molar mass of the vapor species obtained using ESI-mass spectra and thermogravimetry. On the basis of the molar mass so obtained, the equilibrium vapor pressures over a temperature span of 375-465 K, determined by adapting a tested horizontal dual arm single furnace thermoanalyzer as a transpiration apparatus, gave values of 97 ( 1 and 77 ( 2 kJ mol -1 for the standard molar enthalpies of sublimation and vaporization, respectively, for Sc(tmhd) 3. . The vapor pressure and enthalpy results of benzoic acid were found to be in good agreement with the reported data. A hybrid chemical vapor deposition process is described for reproducible solid electrolyte thin films of scandia-stabilized zirconia or alumina-doped ScSZ. The process uses a single solution source of Sc, Zr, and Al -diketonates dissolved in triglyme. Experimental details of this process are described, and the effects of different process parameters are studied in order to improve the quality of the deposited layers.
Nanocrystalline cubic scandium oxide thin film deposition by plasma-assisted (PA) liquid injection (LI) CVD is studied at 773 K in a N 2 /O 2 plasma environment with a triglyme solution of tris(2,4-pentanedionato)scandium(III) (Sc(acac) 3 ) as the precursor. The vapor pressure of the precursor is measured by employing a horizontal, dual-arm, single-furnace, thermogravimetric analyzer as a transpiration apparatus. The standard enthalpy of sublimation (79 AE 1 kJ mol
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