Hydroxy groups were generated on a poly(dimethylsiloxane) (PDMS) surface using different methods. Attempts were made to prepare a homogeneous film on the PDMS surface and eliminate microwrinkles from the surface. Because the hydroxylation process changes the chemical composition of the PDMS surface, resulting in a cracked surface, selecting the best method for surface treatment with minimized surface microwrinkles and cracks was attempted. The results obtained from scanning electron microscopy showed that using the pulsed ultraviolet-ozone (UVO) radiation method with a controlled duration time, ozone treatment, continuous UVO treatment using a glass filter, and water media in UVO treatment was more effective than other methods evaluated in this study to prevent microwrinkles. The results obtained from contact angle measurements and attenuated total reflectance Fourier transform infrared spectroscopy revealed that the UVO treatment in the presence of a water medium created more hydroxy groups compared with other methods.
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