The aim of this paper is to present a rapid modeling method for micropumps, based on electrical analogies and equivalent networks. The different parts of a pump are modelled by means of lumped elements which are calculated using appropriate formulae. These elements are linked together to constitute a network which describes the entire electromechanical system. The networks built were implemented in an electrical simulation tool for rapid analysis. In the case of pneumatic actuation, the method was validated by a qualitative and quantitative comparison with results obtained by another method. The particular case of electrostatic actuation was also investigated, leading to the observation of specific features of this actuation mechanism.

The design of a micropump employing only one valve is presented. This device was simulated by means of a model based on electrical analogies and equivalent networks. With a total size of 5 mm × 5 mm, and a working voltage of 10 V, the device sizing gives flow rates in the 10-100 nl min −1 range, which are very suitable for drug-delivery applications.