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Articles you may be interested inPreparation of transmission electron microscopy cross-section specimens using focused ion beam milling Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique J.Transmission electron microscopy observation of thin foil specimens prepared by means of a focused ion beam A plasma-polymerized protective film for transmission electron microscopy specimen preparation by focused ion beam etching Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method A new technique for the preparation of site specific plan-view specimens using a focused ion beam system is presented. The technique consists of milling a wedge shaped piece of material which is free from the substrate, lifting this out using a micromanipulator and needle, and orientating it on the substrate with the original surface vertical. The plan-view specimen is then milled from this piece of material using an approach based on the ''lift-out'' technique for the preparation of a cross-section specimen. Advantages of this technique over current methods based on the ''lift-out'' and the ''trench'' techniques are that the plan-view specimens are site specific, the surrounding substrate is left intact, and numerous plan-view specimens can be prepared in close proximity to one another.

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