Drop-coated high-refractive-index nanoparticles used as a back reflector for thin-film solar cells are non-absorbing Mie-scatterers that enhance light trapping. We present optical measurements and theory for this approach. A 40% enhancement of the photocurrent and efficiency of a 2.5 μm thick single-crystal Si solar cell on display glass is achieved by adding a back reflector of 270 nm rutile TiO2 nanoparticles.
Self-aligned, n-channel, polycrystalline silicon thin-film transistors with 15 μm channels were fabricated by recrystallizing amorphous silicon for 6 h at 500 °C. A thin nickel silicide at the source and drain was used to seed the crystallization. The channel mobility was initially 87 cm2/V s, and improved to 170 cm2/V s after hydrogenating the devices. The recrystallization velocity in the channel was measured optically and electrically, and found to be 3.5×10−8 cm/s; this value exceeds by two orders of magnitude the solid-phase epitaxial regrowth rate of amorphous silicon. This observation, together with the low activation energy of 0.3 eV measured for the silicide-assisted regrowth velocity as compared to 2.76 eV for epitaxial regrowth, suggest that the channel recrystallization is assisted by Ni diffusing to the recrystallization front.
The development of a new silicon-on-glass (SiOG) substrate and device technology is presented. The SiOG material technology consists of anodic bonding and an implant-induced separation to transfer a single crystalline silicon film onto a glass substrate. The silicon-glass interface region is characterized by an ultra-strong and thermally stable bond, and includes an in situ barrier layer that is free of mobile ions. The fabrication and analysis of CMOS devices fabricated on the SiOG substrate are also presented. The SiOG devices are comparable to those fabricated on SOI (SIMOX) wafers with respect to carrier mobility and off-state leakage current. One application for this SiOG technology is the potential integration of high performance circuits and added functionality for mobile display systems.
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