We have extended the high efficiency of lithographic antennas to mid-infrared wavelengths. Pattern measurements made at 9.5 μm wavelength on a 65°, self-complementary, spiral antenna exhibit a ratio of response to orthogonal linear polarizations of 1.35 dB, a beamwidth of 85° (3 dB full width), a directivity of 8.2 dB, and surprisingly, a close resemblance to the theoretical pattern for a 65° spiral in free space. Direct detection measurements made with an ambient temperature blackbody source yield an antenna efficiency of 52±7%, when corrected for incomplete filling of the antenna beam by the source, at a mean effective wavelength of 19 μm.
A superconducting integrated circuit fabrication process has been developed to encompass a wide range of applications such as Josephson voltage standards, VLSI scale array oscillators, SQUIDS, and kinetic-inductance-based devices. An optimal Josephson junction process requires low temperature processing for all deposition and etching steps. This low temperature process involves an electron cyclotron resonance-based plasma-enhanced chemical vapor deposition of SiO, films for interlayer dielectrics. Experimental design and statistical process control techniques have been used to ensure high quality oxide films. Oxide and niobium etches include endpoint detection and controlled overetch of all 6lms. An overview of the fabrication process is presented.
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