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We present a fabrication method of superconducting quantum interference devices

By combining very low temperature scanning tunneling microscopy and spectroscopy on a TiN film we have observed a nonuniform state comprising of superconducting (S) and normal (N) areas. The local density of states displays a spatial dependence between S and N different from the usual proximity effect. We conclude that mesoscopic fluctuations might play a major role in accordance with recent theories describing superconductor-normal-metal quantum transition.