A high sensitivity, 4.5 µm×4.5 µm InSb thin film micro-Hall sensor (micro-HS) with a minimum field detection (B
min) of 77 nT/(Hz)1/2 was developed for bioscreening applications and used for the detection of a single 2.8 µm diameter superparamagnetic microbead by monitoring its ac magnetic susceptibility. The scalability of the InSb micro-HS was demonstrated by fabricating 500 nm×500 nm InSb nano-Hall sensors with B
min of 0.72 µT/(Hz)1/2 that could potentially be used to detect 100 nm sized superparamagnetic particles.
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