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The results of research the phase composition and electrophysical (resistivity, thermal coefficient of resistance, strain coefficient) and magnetoresistive properties (anisotropic magnetoresistance) of thin films (to 40 nm) high entropy alloys (HEA) based on Al, Cu, Ni, Cr, Fe, Co and Ti. It is established that after forming the layered samples by electron condensation on diffraction pattern fixed lines from the two phases of the fcc lattice and actually tracks the bcc phase. After homogenization by annealing the samples is one of the fcc phase s.s. HEA and traces bcc phase (likely s.s. (-Fe, Cr)), that samples are single phase. The study electrical properties allowed watching the first double-stage plastic deformation of a large value of the coefficient gauge (300 units), watch probably, is typical for НЕА. The character dependences MR from induction indicates to realization of anisotropic magnetoresistance.

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The results of the correlation between the longitudinal strain coefficient (SC) and the values of the Poisson coefficient and Grüneisen parameter for nanosize film multicomponent alloys (d ≅ 30–50 nm, ci ≅ 11–20 at%) are presented. It is established that in the region of elastic or quasi-elastic deformation (less than or equal to 0.4%), the value of SC is insensitive to changes in the Grüneisen parameter in the range of 1.5–2.5 units during the transition to plastic formation (more than 0.4%). The value of SC decreases from 4–5 units to 3–1 units. Similarly, SC is insensitive to changes in the Poisson coefficient less than or equal 0.4 but decreases sharply in the region of plastic deformation. It is concluded that a sensitive element based on a multicomponent nanoscale film of a solid solution, including a high-entropy one, has advantages over others due to phase stability in a wide temperature range. These materials may be used to develop the architecture of sensitive elements of sensors for various functional purposes.

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The results of analysis of literature and own results on the phase composition, electrophysical and magnetoresistive properties of film based granular alloys Co and Ag or Au. As between film systems based on Fe and Ag or Au and Co and Ag or Au much in common, then this work can be seen as a continuation of [1], although we observed significant withdrawal of these two groups of film materials in structural-phase state, causing some change in electrophysical and magnetoresistive properties. The increase of the value of temperature coefficient resistance film Ag (Co) at the сСо ≥ 26 at.% and the strain coefficient at the сСо  70 at.%. It is concluded that the value of GMR completely determined by the temperature measurement and perfection of granulate state. Кeywords: Films Ag(Co) and Au(Co), Structural and phase state, Electrophysical and magnetoresistive properties, Temperature coefficient of resistance, Strain coefficient.