Proton Beam Writing on Chitosan Films for Bionanomedicine and Microfluidics: Pilot Experiments

Polozhii, Hlib E.; Kolinko, S.V.; Zinchenko, Yevgen; Калинкевич, А. Н.; Danilchenko, S. N.; Ponomarev, A.G.; Protsenko, I. Yu.

doi:10.1109/nap51477.2020.9309570

Cited by 3 publications

(2 citation statements)

References 8 publications

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“…Хітозан -матеріал, який отримується з хітину (відходу харчової промисловості), який вже було успішно використано в ультрафіолетовій та електронній літографії [12]. В ІПФ НАН України було вперше в світі проведено пілотні експерименти з протонної літографії по плівках хітозану [13]. Також було проведено експериме-нти з векторної протонної літографії по плівках хітозану, вкритих тонкими плівками різних матеріалів [14], зокрема титаном (рис.…”

Section: переваги протонної літографії та світовий досвідunclassified

Proton beam writing: World experience and prospectives in Ukraine

Polozhii¹,

Ponomarev²,

Kolinko³

et al. 2023

Nucl. Phys. At. Energy

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Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Numerous publications demonstrate prospective applications of proton beam writing in different fields related to micro- and nanostructures fabrication. Proton beam writing may be used both for nanoelectronics and three-dimensional microstructures with a high aspect ratio. Work on proton beam writing technology is being conducted at the Institute of Applied Physics of the National Academy of Sciences of Ukraine. Last years there were introduced vector proton beam writing method, an electrostatic blanker system for proton beam distortion, and experiments on proton beam writing on chitosan films were conducted, including the films covered with thin films of metals and metal compounds.

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Section: переваги протонної літографії та світовий досвідunclassified

Proton beam writing: World experience and prospectives in Ukraine

Polozhii¹,

Ponomarev²,

Kolinko³

et al. 2023

Nucl. Phys. At. Energy

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“…Another advantage of proton-beam writing is a possibility to work with new materials. We have already conducted a pilot experiment with proton-beam writing on chitosan [8] − an environment-friendly polymer that can be fabricated in mass by recycling chitin from seafood industry and developed in lithography just with pure water. We plan to experiment with other new materials for proton-beam writing.…”

Section: Further Equipment Upgrades and Technology Application Prospe...mentioning

confidence: 99%

Vector Proton Beam Writing System

Polozhii¹,

Ponomarev²,

Kolinko³

et al. 2022

Problems of Atomic Science and Technology

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Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused beam size and shape are measured by scanning standard copper mesh for e-beam microscopy. Prospectives of hardware and software upgrade are regarded. Vector proton-beam writing technology can be used in many applications, including X-ray optics, electronics prototyping, microrobotics, microfluidics, photonics and microstructure fabrication in new materials.

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Controllable structures on the surface of natural polymers made by proton beam writing and femtosecond laser treatment

Kalinkevich

Polozhii

Kolinko

et al. 2022

Low Temperature Physics

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Microstructures with a given topology were created on the surface of pure chitosan films and the same films with nanometer Ti- and Zn-containing layers deposited by magnetron sputtering. These structures were obtained using two methods: proton lithography and femtosecond laser processing. The quality of the structures (the sharpness of the walls and the thickness of the channel) is comparable to the quality of the structures obtained in the classical synthetic resist for proton lithography (polymethylmethacrylate, PMMA). A thin metal layer on the surface of the biopolymer matrix (resist) does not interfere with the formation of structures by the proton beam writing method. Laser treatment allows us to create repeating structures that control the biocompatibility of the treated surface.

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Proton Beam Writing on Chitosan Films for Bionanomedicine and Microfluidics: Pilot Experiments

Cited by 3 publications

References 8 publications

Proton beam writing: World experience and prospectives in Ukraine

Proton beam writing: World experience and prospectives in Ukraine

Vector Proton Beam Writing System

Controllable structures on the surface of natural polymers made by proton beam writing and femtosecond laser treatment

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