A one-dimensional surface relief with a 1.20  ±  0.02 µm period was formed in amorphous hydrogenated silicon films as a result of irradiation by femtosecond laser pulses (1.25 µm) with a fluence of 0.15 J cm−2. Orientation of the formed structures was determined by the polarization vector of the radiation and the number of acting pulses. Nanocrystalline silicon phases with volume fractions from 40 to 67% were detected in the irradiated films according to the analysis of Raman spectra. Observed micro- and nanostructuring processes were caused by surface plasmon–polariton excitation and near-surface region nanocrystallization, respectively, in the high-intensity femtosecond laser field. Furthermore, the formation of Si-III and Si-XII silicon polymorphous modifications was observed after laser treatment with a large exposure dose. The conductivity of the film increased by three orders of magnitude at proper conditions after femtosecond laser nanocrystallization compared to the conductivity of the untreated amorphous surface. The conductivity anisotropy of the irradiated regions was also observed due to the depolarizing contribution of the surface structure, and the non-uniform intensity distribution in the cross-section of the laser beam used for modification.

ZnSe nanocrystals have been formed in the silicon dioxide matrix by the sequential high-fluence implantation of Zn + and Se + ions at 500°C. After implantation a part of samples was annealed at 1000°C for 3 min using rapid thermal annealing. Structural and optical properties of ZnSe/SiO 2 nano-composite films were analyzed by means of Rutherford Backscattering Spectrometry, cross-sectional Transmission Electron Microscopy, Raman scattering and photoluminescence techniques. It was shown that a sequence of implantation affects structural and optical properties of synthesized ZnSe clusters. Based on the Raman scattering and photoluminescence data the samples for which Zn ions were implanted first exhibited a better ZnSe crystalline quality than those of reverse sequence of implantation, i.e. with Se ions implanted at the beginning. The bands of blue ZnSe band edge emission and green-red ZnSe deep defect level emission were revealed in the PL spectra of the as-implanted and annealed nano-composites. The PL spectral features observed in the blue region are due to the quantum-size effects in the ZnSe nanocrystals embedded into the silicon dioxide matrix. The PL intensity ratio of the deep defect band to the near edge emission is higher in the samples first implanted with Se ions, and Zn ions implanted next. The effect of rapid thermal annealing on structural and light-emitting properties was discussed.

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