No abstract

Areal Cross Correlation Function, a statistical function of three dimensional surface topography ANOVA Analysis of Variance ATF Bureau of Alcohol, Tobacco, Firearms, and Explosives BF Breech face CCF Cross Correlation Function, a statistical function of two dimensional surface topography DAS Data Acquisition Station, a component of IBIS (below) EEEL Electronics and Electrical Engineering Laboratory, an organizational unit of NIST FP Firing pin

Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.

Three optical instruments including an interferometric microscope, a Nipkow disc confocal microscope and a laser scanning confocal microscope and a stylus instrument are used for the measurements of bullet profile signatures of a National Institute of Standards and Technology (NIST) Standard Reference Material (SRM) 2460 standard bullet. The two-dimensional profile signatures are compared with the virtual bullet standard signature established by the same stylus instrument. The bullet signature differences are quantified by the maximum cross-correlation function CCFmax. If the compared signatures were exactly the same, CCFmax would be 100%. Comparison results show close agreement among the four techniques for bullet profile signature measurements. The average CCFmax values are higher than 90%. This supports the possibility of using surface topography techniques for ballistic identifications as an alternative to the current technology based on image comparisons.

No abstract

Freeform optics have emerged as promising components in diverse applications due to the potential for superior optical performance. There are many research fields in the area ranging from fabrication to measurement, with metrology being one of the most challenging tasks. In this paper, we describe a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative freeform optic.

We propose a new concept of single-shot deflectometry for real-time measurement of three-dimensional surface profile using a single composite pattern. To retrieve an accurate phase from one-frame composite pattern, we adapt the Fourier Transform (FT) method and the spatial carrier-frequency phase-shifting (SCPS) technique to our proposed deflectometry. Based on Lissajous figure and ellipse fitting method, we also correct the phase extraction error in SCPS technique by reducing the effect of background and modulation variations. The proposed technique is verified by comparing our measurement results with phase-shifting deflectometry, and the maximum difference between two measurement results is less than 30 nm rms. We also test the robustness to vibration and the measurement capability for dynamic object.

The autofocusing is one of the important parts in the automated vision inspection or measurement using optical microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision autofocusing. In this paper, we propose and realize an autofocusing system using two cylindrical lenses, which is the enhanced version of the previous astigmatism method. It shows very good performances, especially very high speed and the largest range in comparison with the previous astigmatic methods. The performance of our autofocusing system was evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer. Then we applied the autofocusing to the direct laser lithographic system, and successfully fabricated circular symmetry patterns on a 300 mm diameter surface with the resolution of less than 1 microm within the defocusing range of +/-50 microm. The speed of the autofocusing was 150 Hz.