The critical dimension (CD) uniformity of an isolated-dense pattern has been the most critical issue in optical lithography below the wavelength of the illumination source and
much effort has been exerted to improve it. The CD difference between isolated and dense patterns (ID bias), which is caused by proximity effects, is known to be one of the
key factors leading to the deterioration of CD uniformity. Because ID bias is such a complicated phenomenon and affected by many factors, it would be very difficult to control it even though we understand all the factors that lead to it. Much research on ID bias has been conducted; however, the effect of resist thickness on ID bias has not yet been
clearly studied. From our investigations, we have investigated the effects of resist thickness on ID bias and found that ID bias is strongly affected by resist thickness. ID bias changes periodically with resist thickness and the minimum ID bias is obtained by controlling the resist thickness for a specified pattern. We also found that the antireflective coating (ARC) process is an effective method for controlling ID bias.
The purpose of this paper is to present a new strategic framework of Supply Chain Management (SCM) in the automobile industry. For our purpose, we first had studied about the structure of relationship between supplier and buyer in Korean automobile industry. With this study, we searched for factors which compose a strategy of SCM, and whether or not the companies' performance that are influenced by specific SCM strategy factors. Of course, our study based on existing researches, especially Cox et al.(1995) and Venkatraman et al.(1992), but the existing researches is differentiated in this paper that is treated several power factors as resource, value, environment and relation. So, results of our paper are what a good strategy of SCM composed by these factors and how to adopt this strategy on global logistics. And our methodology has some using of statistics method by SPSS 14(v) such as factor analysis, reliability analysis, and SEM(Structural Equation Model) with AMOS.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.