Spatially resolved information about the distribution and chemical composition of inclusions in steel are gained by scanning methods, such as scanning electron microscopy with energy dispersive X-ray spectroscopy, electron probe microanalysis or capillary-X-ray flourescence. Scanning laser-induced breakdown spectroscopy (LIBS) offers distinct advantages in contrast to these conventional methods. Sample polishing or high vacuum conditions are not necessary, a simple grinding of the sample is sufficient for the preparation. Analysing times can be reduced significantly. At Fraunhofer ILT a measuring system was developed enabling for the first time high-speed scanning LIBS with measuring frequencies of up to 1000 Hz. Sample surfaces with dimensions up to 110×45 mm2 can be analyzed. Light elements such as C, N, O, P, and S are detected, which is demonstrated by the identification of nonmetallic inclusions in steel. Principle, features and results of high-speed scanning LIBS with a spatial resolution<20 μm are presented.
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