Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density distributions and maxima. The equation coefficients of theoretical model associated with the ICP generator experimental system can be obtained by fitting the simulation curve with the least square method, and the theoretical pressure calibration curves under different absorbed powers can be further obtained. Combined with the vacuum gauge measurements, both the simulated and theoretical pressure calibration curves can give the true local pressure in the plasma. The results of the local pressure calibration at the different absorbed powers show that the density gradient from the vacuum gauge sensor to the center of the coil in ICP generator cavity becomes larger with the increase of electron density, resulting in a larger gap between the measured value and the pressure calibration value. This calibration method helps to grasp the local pressure of ICP as an external control factor and helps to study the physicochemical mechanism of ICP in order to achieve higher performance in ICP etching, material modification, etc.
Firstly, the electron density distribution of inductively coupled plasma (ICP) is measured by laser Thomson scattering (TS) method and the features of the ICP under the same experimental conditions are simulated by finite element method (FEM). The simulated results are in good agreement with the experimental results, which verifies the accuracy of the ICP generation simulation model. Secondly, the propagation characteristics of terahertz wave in ICP are measured by terahertz time domain spectroscopy (THz-TDS) and calculated by FEM according to the electron density distribution of ICP simulated in the first step above. The high consistency between the experimental and simulation results of terahertz wave propagation characteristics in ICP further proves the accuracy of terahertz wave transmission model in plasma and the feasibility of joint simulation with ICP generation simulation model.
High-resolution microscopy technique is of significant importance for studying nanomaterials. It is necessary to understand the near-field interaction between the probe and substrate materials in order to get the fine structure of the nanomaterial in the subwavelength scale. The numerical methods such as FDTD, FEM, and MoM are inefficient for the SNOM problems because of the illness of the impedance matrix. The analytic method can only be used for some simple objects such as sphere. Here, a quasianalytical method is developed, in which the analytic formula is refined to adapt to various shapes of the probe approaching the curve of SNOM. By this way, it is helpful in comparing the performance of different probes and giving us a direction to design a new type probe in SNOM. As an application, the developed method is used to study the contrast in the SNOM for the interface between the two different surfaces that have different materials and topography.
The interaction between particles cannot be ignored when a high frequency electromagnetic wave is incident on a mixed media. Strong fluctuation theory with correlation function is a suitable method to describe the problem. Materials with honeycomb sandwich structures with an absorber included are investigated. The effective electromagnetic parameters and reflection coefficient of these materials are deduced and numerical results are given. Compared with the method with a disturbing term not considered, this method shows better absorbing properties.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.