2021
DOI: 10.1364/oe.435910
|View full text |Cite
|
Sign up to set email alerts
|

Propagation characteristics of terahertz wave in inductively coupled plasma

Abstract: Firstly, the electron density distribution of inductively coupled plasma (ICP) is measured by laser Thomson scattering (TS) method and the features of the ICP under the same experimental conditions are simulated by finite element method (FEM). The simulated results are in good agreement with the experimental results, which verifies the accuracy of the ICP generation simulation model. Secondly, the propagation characteristics of terahertz wave in ICP are measured by terahertz time domain spectroscopy (THz-TDS) … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 7 publications
(2 citation statements)
references
References 19 publications
0
2
0
Order By: Relevance
“…In recent times, THz technology have made great progress in basic research fields such as biological diagnosis, medical imaging, and wireless communication [7][8][9][10][11]. Artificial electromagnetic materials, such as photonic crystals (PCs), metamaterials, and plasma elements, have been extensively studied and used to modulate THz waves [12][13][14]. THz magneto-optical (MO) elements, controlled by an external magnetic field, are integral parts of the field of broadband amplitude modulation [15,16].…”
Section: Introductionmentioning
confidence: 99%
“…In recent times, THz technology have made great progress in basic research fields such as biological diagnosis, medical imaging, and wireless communication [7][8][9][10][11]. Artificial electromagnetic materials, such as photonic crystals (PCs), metamaterials, and plasma elements, have been extensively studied and used to modulate THz waves [12][13][14]. THz magneto-optical (MO) elements, controlled by an external magnetic field, are integral parts of the field of broadband amplitude modulation [15,16].…”
Section: Introductionmentioning
confidence: 99%
“…Jang et al employed terahertz time domain spectroscopy (THz-TDS) to diagnose electron density and collision frequency information in an inductively coupled plasma (ICP) source, and analyzed the effects of RF power and gas pressure on electron density [16][17]. Sun et al verified the feasibility of ICP and THz wave transmission combined model based on THz-TDS and laser Thomson scattering method, and the effect of RF power and gas pressure on the terahertz transmission characteristics in ICP was further discussed [18]. The plasma sources concerned in the above terahertz wave transmission researches are all ICP devices due to its high-density characteristics.…”
Section: Introductionmentioning
confidence: 99%