We have developed a carbon nanostructure, which is comprised of high-density carbon nanotips on a graphite layer. These carbon nanotips, with tip diameters of ∼10 nm, are grown by high-density plasma chemical vapor deposition onto Ni-coated Si using an inductively coupled plasma. The Ni on Si changes into NiSi2 by substrate heating. First, a carbon buffer layer and then a graphene sheet are formed on the NiSi2. Then, the carbon nanotips are grown by a C2H2/H2 plasma on the graphene sheet. The carbon nanotips show good adhesion to the substrate and are almost aligned, with an average length of 110 nm. They exhibit a turn-on field of 0.1 V/μm, a field amplification factor of ∼13 000, a current density of 2 mA/cm2 at a field of 2 V/μm, and uniform electron emission.
We have developed a low temperature carbon nanotube (LT‐CNT) growing process that can be used for electron emitter of field emission display (FED). Using this process technology, we successfully demonstrated a 5.4 inch LT‐CNT FED using conventional 0.7 mm glass substrate without any distortion due to the thermal shrinkage of the glass substrate.
The high density carbon nanotips were grown on the Si by high-density plasma chemical vapor deposition with inductively coupled plasma. The tips have 5~10 nm radius with ~100nm length. The highbrightness FED lamps of > 32,000 cd/m 2 made of carbon nanotip emitter were demonstrated in this work.
We developed self-organized carbon nano-tips using a high density plasma CVD. A C 2 H 2 /H 2 mixture was used as source gas for the deposition. The carbon nano-tips showed good adhesion to the substrate and exhibited a turn-on field as low as 0.1 V/µm and uniform light emission from a phosphor screen.
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