The CO 2 gas sensor, based on the principle of electro-chemistry, was fabricated using the solid-electrolyte Li 3 PO 4 film formed by a thermal evaporator and its sensing performances were studied. Thermal evaporated film was prepared with power of 10A, a working pressure of 10 -6 mTorr and thickness of 1.2 µm. Then, it was annealed at 800 o C for 2h in air. Li 2 TiO 3 +TiO 2 and Li 2 CO 3 film were prepared using a screen printing method as the reference and the sensing electrode, respectively. Li 3 PO 4 film showed a much denser structure than bulk-type Li 3 PO 4in SEM images. The response and recovery characteristics were very good at the higher CO 2 concentration and its value was 280 mV and changed to 260 mV in the higher CO 2 environment. It was also observed that the sensitivity decreased by 98 % when the CO 2 concentration increased from 250 ppm to 5000 ppm. Response time and recovery time were measured to be 5 s and 7 s, respectively. These results showed enough potential for developing a CO 2 gas sensor using Li 3 PO 4 film instead of the bulk-type.
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