Abstract. Isomeric yield ratios of 30 fission products in 24 MeV proton-induced fission of 23au were measured by the use of the ion-guide isotope separator on-line. The obtained isomeric yield ratios were converted to the angular momenta of primary fission fragments based on the statistical model. The deduced angular momenta were examined from various aspects. It is found that in general the angular momentum continuously increases with the fragment mass number including the region of symmetric mass division. However, there are some exceptions. For Sn isotopes the deduced angular momenta are quite small due to the spherical shape of the nuclear shell configuration. It is also concluded from the consideration of the charge distribution that the angular momentum of fission product scatters considerably within the narrow range of mass division. The dependence of the angular momentum on the available energy of fragments at scission point indicates that the individual fragment possesses a characteristic deformation at scission and/or the deduced angular momentum is seriously affected by the particle excitation after scission.

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Optical lithography is facing resolution limit. To overcome this issue, highly complicated patterns with high data volume are being adopted for optical mask fabrications. With this background, new electron beam mask writing system, EBM-7000 is developed to satisfy requirements of hp 32nm generation. Electron optical system with low aberrations is developed to resolve finer patterns like 30nm L/S. In addition, high current density of 200 A/cm 2 is realized to avoid writing time increase. In data path, distributed processing system is newly built to handle large amounts of data efficiently. The data processing speed of 500MB/s, fast enough to process all the necessary data within exposure time in parallel for hp32nm generation, is achieved. And this also makes it possible to handle such large volume dense data as 2G shots/mm 2 local pattern density.In this paper, system configuration of EBM-7000 with accuracy data obtained are presented.