In this paper, a novel 2-DOF permanent magnet planar eddy current damper is proposed, of which the stator is made of a copper plate and the mover is composed of two orthogonal 1-D permanent magnet arrays with a double sided structure. The main objective of the planar eddy current damper is to provide two orthogonal damping forces for dynamic systems like the 2-DOF high precision positioning system. Firstly, the basic structure and the operating principle of the planar damper are introduced. Secondly, the analytical model of the planar damper is established where the magnetic flux density distribution of the permanent magnet arrays is obtained by using the equivalent magnetic charge method and the image method. Then, the analytical expressions of the damping force and damping coefficient are derived. Lastly, to verify the analytical model, the finite element method (FEM) is adopted for calculating the flux density and a planar damper prototype is manufactured and thoroughly tested. The results from FEM and experiments are in good agreement with the ones from the analytical expressions indicating that the analytical model is reasonable and correct.
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