In this work, synthesis and characterization of Al2O3, TiO2and Al2O3 / TiO2hyper thin films, with 25 nm and 50 nm,have been investigated by using Atomic layer deposition method (ALD) at high vacuum (0.27 Torr) onto the cobalt chromium alloy (ASTM F75) and si-wafer (100) substrates. The characterizationshave been investigated using transmission electron microscopy (TEM), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDX), optical profilometer and ellipsometry spectroscopy. Morphological characterization and thickness evaluation has been obtained by optical profiler and ellipsometry spectroscopy respectively. SEM has been used to find the presence of thin film defects and the particle shape/size of the thin films. EDX has been used to obtain the element analysis of the thin films. The results have shown good quality thin films, homogeneity, without defects or micro-crack and good thin films properties. Small crystalline regions have been found in the TiO2thin film by selected area diffraction pattern(SADP) image. Al2O3ALD film exhibited lower surface roughness values and good thin film thickness control compared with TiO2and Al2O3 / TiO2.
Nanocoatings thin films are layers deposited to improve required properties and corrosion resistance as a major objective for materials that are used for various biomedical applications such as biosensors. In this study, Gold (Au) thin films with 50 nm and 100 nm have been synthesized on Ni-Cr-Mo alloys by magnetron sputtering deposition technique. X-Ray diffraction (XRD), Atomic Force Microscopy (AFM), and Energy-dispersive X-Ray spectroscopy /Scanning Electron Microscopy (EDS/SEM ) have been used to distinguish the surfaces morphology. The results showed that there is no defects or micro-cracks with a uniform and homogenous film. It has spherical nanoparticles diameter morphology with 200-400 nm shaped to fine aggregation. The roughness average (Ra) decreased from 3.91 nm for 50 nm films to 3.70 nm for 100nm films with FCC crystal structure (111) for gold thin films. In vivo, after 50 nm and 100 nm nanocoated thin film by gold, a significant improvement in the localized corrosion resistance has been obtained in artificial saliva corrosive media at 37 °C compared with the uncoated surface.
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