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The resistance of the electron gas (2DEG) at the interface between the two band insulators LaAlO3 (LAO) and SrTiO3 (STO) typically drops monotonically with temperature and R/T curves during cooling and warm-up look identical for large area structures. Here we show that if the LAO/STO is laterally restricted by nanopatterning the resistance exhibits a temperature anomaly. Warming up nanostructures from low temperatures leads to one or two pronounced resistance peaks between 50 and 100 K not observed for larger dimensions. During cool-down current filaments emerge at the domain walls that form during a structural phase transition of the STO substrate. During warm-up the reverse phase transition can interrupt filaments before the sheet conductivity which dominates at higher temperature is reestablished. Due to the limited number of filaments in a nanostructure this process can result in a complete loss of conductance. As a consequence of these findings the transport physics extracted from experiments in small and large area LAO/STO structures may need to be reconsidered.

We report the fabrication of nanostructures from the quasi-two-dimensional electron gas (q2DEG) formed at the LaAlO3/ SrTiO3 (LAO/STO) interface. The process uses electron beam lithography in combination with reactive ion etching. This technique allows to pattern high-quality structures down to lateral dimensions as small as 100nm while maintaining the conducting properties without inducing conductivity in the STO substrate. Temperature dependent transport properties of patterned Hall bars of various widths show only a small size dependence of conductivity at low temperature as well as at room temperature. The deviation can be explained by a narrow lateral depletion region. All steps of the patterning process are fully industry compatible.

We have developed a chlorine based dry etching process for nanopatterning the ferromagnetic oxide La0.7Sr0.3MnO3 (LSMO). Large arrays of millions of identical structures have been fabricated from thin LSMO films by electron-beam lithography and reactive ion etching. SQUID magnetometry demonstrates that patterned nanostructures with lateral dimensions down to 100 nm retain their full magnetization and the Curie temperature of the bulk layer. In addition, their shape anisotropy is sufficient to overcome the crystalline anisotropy of the bulk. High resolution scanning transmission electron microscopy shows that crystallinity is preserved even at the edges of the nanostructures.

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