Microwave sensors can probe intrinsic material properties of analytes in a microfluidic channel at physiologically relevant ion concentrations. While microwave sensors have been used to detect single cells and microparticles in earlier studies, the synergistic use and comparative analysis of microwave sensors with optical microscopy for material classification and size tracking applications have been scarcely investigated so far. Here we combined microwave and optical sensing to differentiate microscale objects based on their dielectric properties. We designed and fabricated two types of planar sensor: a Coplanar Waveguide Resonator (CPW) and a Split-Ring Resonator (SRR). Both sensors possessed sensing electrodes with a narrow gap to detect single cells passing through a microfluidic channel integrated on the same chip. We also show that standalone microwave sensors can track the relative changes in cellular size in real-time. In sensing single 20-micron diameter polystyrene particles, Signal-to-Noise ratio values of approximately 100 for CPW and 70 for SRR sensors were obtained. These findings demonstrate that microwave sensing technology can serve as a complementary technique for single-cell biophysical experiments and microscale pollutant screening.

Precise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Applied pressure and fluid flow induce different modes of deformations on the membrane, which are electronically probed by an integrated microwave resonator. The flow changes the capacitance, and in turn resonance frequency, of the microwave resonator. By tracking the resonance frequency, liquid flow was probed with the device. In addition to responding to applied pressure by deflection, the membrane also exhibits periodic pulsation motion under fluid flow at a constant rate. The two separate mechanisms, deflection and pulsation, constitute sensing mechanisms for pressure and flow rate. Using the same device architecture, we also detected pressure-induced deformations by a gas to draw further insight into the sensing mechanism of the membrane. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid-structure interactions at micro-and nanoscales.

Precise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Fluid flow induces deformations on the membrane, which is electronically probed by the changes in the capacitance and resonance frequency of an overlapping microwave resonator. By tracking the resonance frequency, both liquid and gas flows were probed with the same device architecture. For liquid flow experiments, a secondary sensing mechanism emerged when it was observed that steady liquid flow induces periodic deformations on the membrane. Here, the period of membrane deformation depends on the flow rate and can again be measured electronically by the microwave sensor. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid-structure interactions at micro and nanoscales.

The purpose of this study is presenting an active micro-mixer, which is based on AC electro-osmotic flow driven on 3D micro wires. In order to solve governing equations of AC electroosmosis, a commercial software COMSOL Multiphysics® is implemented. Different wire configurations with various imposed electric fields and flow rates are tested for evaluating mixing efficiencies. The analyses show that mixing performance is significantly improved by number of the wires as well as wire orientation. It is also revealed that the degree of mixing can also be controlled by the tuning of the applied voltage for a given flow rate.

The size of a cell is one of the most fundamental biophysical parameters it possesses. Traditionally size measurements are done by using optical microscopy and quantitative phase imaging. However, a sensor with higher resolution, high throughput and lower cost is still needed. Here, a novel microfluidics-integrated microwave sensor is demonstrated to characterize single cells in real-time without labelling. Coplanar waveguide resonator is designed with a bowtie-shaped sensing electrodes separated by 50 μm. Cells are transported to sensing region by microfluidic channels and their sizes are measured simultaneously by the microwave sensors and optical microscopy. To enhance the microwave resolution, the microwave resonator is equipped with external heterodyne measurement circuitry detecting each and every cell passing through the sensing region. By comparing quantitative microscopic image analysis with frequency shifts, we show that microwave sensors can effectively measure cellular size. Our results indicate that microfluidicsintegrated microwave sensors (MIMS ) can be used for detecting.