High-Resolution Dielectric Characterization of Single Cells and Microparticles Using Integrated Microfluidic Microwave Sensors

Secme, Arda; Tefek, Uzay; Sarı, Burak; Pisheh, Hadi Sedaghat; Uslu, H. Dilara; Akbulut, Özge; Kucukoglu, Berk; Erdogan, R. Tufan; Alhmoud, Hashim; Şahin, Özgür; Hanay, M. Selim

doi:10.1109/jsen.2023.3250401

Cited by 18 publications

(7 citation statements)

References 70 publications

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“…With this method, we could effectively keep track of the shifts in the resonance. A similar sensor without the membrane was utilized in different experiments which did not exhibit any of the fluid-related dynamics reported in this work (Secme et al 2023). This work serves as a control experiment, indicating that the thin membrane is at the origin of the response to the applied pressure and fluid flow.…”

Section: Methodsmentioning

confidence: 99%

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

Secme

Pisheh

Tefek

et al. 2023

Microfluid Nanofluid

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Precise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Applied pressure and fluid flow induce different modes of deformations on the membrane, which are electronically probed by an integrated microwave resonator. The flow changes the capacitance, and in turn resonance frequency, of the microwave resonator. By tracking the resonance frequency, liquid flow was probed with the device. In addition to responding to applied pressure by deflection, the membrane also exhibits periodic pulsation motion under fluid flow at a constant rate. The two separate mechanisms, deflection and pulsation, constitute sensing mechanisms for pressure and flow rate. Using the same device architecture, we also detected pressure-induced deformations by a gas to draw further insight into the sensing mechanism of the membrane. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid-structure interactions at micro-and nanoscales.

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Section: Methodsmentioning

confidence: 99%

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

Secme

Pisheh

Tefek

et al. 2023

Microfluid Nanofluid

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“…Different microwave structures, such as resonators, CPW, and microstrip line, have been used for cell sensing. Resonators yield high sensitivity but have limited operating frequency points [32]. In CPWs, signal strength varies depending on cell position relative to CPW electrode [33].…”

Section: Microstrip Sensing Devices and Microwave Spectroscopic Flow ...mentioning

confidence: 99%

Microwave Flow Cytometric Detection and Differentiation of Escherichia coli

Dahal,

Peak,

Ehrett

et al. 2024

Sensors

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Label-free measurement and analysis of single bacterial cells are essential for food safety monitoring and microbial disease diagnosis. We report a microwave flow cytometric sensor with a microstrip sensing device with reduced channel height for bacterial cell measurement. Escherichia coli B and Escherichia coli K-12 were measured with the sensor at frequencies between 500 MHz and 8 GHz. The results show microwave properties of E. coli cells are frequency-dependent. A LightGBM model was developed to classify cell types at a high accuracy of 0.96 at 1 GHz. Thus, the sensor provides a promising label-free method to rapidly detect and differentiate bacterial cells. Nevertheless, the method needs to be further developed by comprehensively measuring different types of cells and demonstrating accurate cell classification with improved machine-learning techniques.

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“…Secme et al [ 183 ] developed and compared two types of planar microwave sensors, a coplanar waveguide (CPW) and a split-ring resonator (SRR), integrated with optical microscopy to differentiate microscale objects based on their dielectric properties. The standalone microwave sensors were capable of the real-time tracking of relative changes in cellular size and exhibited high signal-to-noise ratios, demonstrating the potential of microwave sensing as a complementary technique for single-cell biophysical experiments and microscale pollutant screening.…”

Section: Overview Of Recent Innovations Addressing Different Challengesmentioning

confidence: 99%

Recent Progress in Micro- and Nanotechnology-Enabled Sensors for Biomedical and Environmental Challenges

Tovar-Lopez

2023

Sensors

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Micro- and nanotechnology-enabled sensors have made remarkable advancements in the fields of biomedicine and the environment, enabling the sensitive and selective detection and quantification of diverse analytes. In biomedicine, these sensors have facilitated disease diagnosis, drug discovery, and point-of-care devices. In environmental monitoring, they have played a crucial role in assessing air, water, and soil quality, as well as ensured food safety. Despite notable progress, numerous challenges persist. This review article addresses recent developments in micro- and nanotechnology-enabled sensors for biomedical and environmental challenges, focusing on enhancing basic sensing techniques through micro/nanotechnology. Additionally, it explores the applications of these sensors in addressing current challenges in both biomedical and environmental domains. The article concludes by emphasizing the need for further research to expand the detection capabilities of sensors/devices, enhance sensitivity and selectivity, integrate wireless communication and energy-harvesting technologies, and optimize sample preparation, material selection, and automated components for sensor design, fabrication, and characterization.

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High-Resolution Dielectric Characterization of Single Cells and Microparticles Using Integrated Microfluidic Microwave Sensors

Cited by 18 publications

References 70 publications

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

Microwave Flow Cytometric Detection and Differentiation of Escherichia coli

Recent Progress in Micro- and Nanotechnology-Enabled Sensors for Biomedical and Environmental Challenges

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