BYIon implantation into crystalline quartz and fused silica results in radiation damage associated with remarkable refractive index modifications /1 to 3/. Defect formation and the changes of the SO4-tetrahedra ring structure are mainly caused by nuclear processes /2 to 4/. Energy deposition by electronic processes influences also the structure of the Si02 network in fused silica /4/ as well as in predamaged quartz /5/, but in each case with a very small efficiency.
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