Solid phase epitaxial growth of ion beam-amorphized α-quartz has been studied by means of Rutherford backscattering spectrometry in channeling geometry. α-quartz single crystals were irradiated with Cs+ and Xe+ ions and annealed in air or in vacuum at 500–900 °C. Complete epitaxial regrowth has been observed in the Cs-irradiated samples, after 875 °C annealing in air. On the other hand, vacuum annealing provided only incomplete regrowth of the amorphous layer, while Xe-irradiated α-quartz could not be regrown up to 900 °C. The behavior of Cs in the recrystallization process is discussed in terms of the SiO2-network topology.