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A multi-wavelength interferometer utilizing the frequency comb of a femtosecond laser as the wavelength ruler is tested for its capability of ultra-precision positioning for machine axis control. The interferometer uses four different wavelengths phase-locked to the frequency comb and then determines the absolute position through a multi-channel scheme of detecting interference phases in parallel so as to enable fast, precise and stable measurements continuously over a few meters of axis-travel. Test results show that the proposed interferometer proves itself as a potential candidate of absolute-type position transducer needed for next-generation ultra-precision machine axis control, demonstrating linear errors of less than 61.9 nm in peak-to-valley over a 1-meter travel with an update rate of 100 Hz when compared to an incremental-type He-Ne laser interferometer.

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A prototype laser distance interferometer is demonstrated by incorporating the frequency comb of a femtosecond laser for mass-production of optoelectronic devices such as flat panel displays and solar cell devices. This comb-referenced interferometer uses four different wavelengths simultaneously to enable absolute distance measurement with the capability of comprehensive evaluation of the measurement stability and uncertainty. The measurement result reveals that the stability reaches 3.4 nm for a 3.8 m distance at 1.0 s averaging, which further reduces to 0.57 nm at 100 s averaging with a fractional stability of 1.5 × 10−10. The uncertainty is estimated to be in a 10−8 level when distance is measured in air due to the inevitable ambiguity in estimating the refractive index, but it can be enhanced to a 10−10 level in vacuum.

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In this study, the substitution behavior of Ag atoms in the Ti2AlC ceramic was investigated using high‐angle annular dark field scanning transmission electron microscopy (HAADF‐STEM). The TEM sample of the Ag/Ti2AlC interaction area was prepared following the wetting experiment, which was carried out at 1030°C for 5 minute using the sessile drop method. The Ag “single atoms” or “nanoclusters” were found in the crystal lattice of Ti2AlC substrate. The characterizations along two typical crystallographic orientations suggest that both the Ti and Al atoms could be substituted by Ag atoms during the wetting process. In addition, the substitution behavior would contribute to the lattice expansion, which was coordinated by elastic distortion in the Ag nanoclusters with small size. However, when the Ag nanoclusters exceeded the critical size, the intact Ti2AlC structure could no more sustain and defects like stacking faults formed, based on which the Ag nanotwins or polycrystals nucleated.