Ion
sensitive field effect transistors (ISFETs) form a very attractive
solution for wearable sensors due to their capacity for ultra-miniaturization,
low power operation, and very high sensitivity, supported by complementary
metal oxide semiconductor (CMOS) integration. This paper reports for
the first time, a multianalyte sensing platform that incorporates
high performance, high yield, high robustness, three-dimensional-extended-metal-gate
ISFETs (3D-EMG-ISFETs) realized by the postprocessing of a conventional
0.18 μm CMOS technology node. The detection of four analytes
(pH, Na+, K+, and Ca2+) is reported
with excellent sensitivities (58 mV/pH, −57 mV/dec(Na+), −48 mV/dec(K+), and −26 mV/dec(Ca2+)) close to the Nernstian limit, and high selectivity, achieved
by the use of highly selective ion selective membranes based on postprocessing
integration steps aimed at eliminating any significant sensor hysteresis
and parasitics. We are reporting simultaneous time-dependent recording
of multiple analytes, with high selectivities. In vitro real sweat
tests are carried out to prove the validity of our sensors. The reported
sensors have the lowest reported power consumption, being capable
of operation down to 2 pW/sensor. Due to the ultralow power consumption
of our ISFETs, we achieve and report a final four-analyte passive
system demonstrator including the readout interface and the remote
powering of the ISFET sensors, all powered by an radio frequency (RF)
signal.
Using microfluidics, we isolate cancer cells under fluid flow mimicking sinusoidal capillaries. With deep-learning and FUCCItrack, we analyze 2D/3D time-lapse multi-channel images to study cell cycle dynamics, motility, volume, and morphology.
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