Free-standing mesoscale (340 lm  30 lm  20 lm) bend bars with an aspect ratio over 15:1 and an edge resolution as fine as a single grain diameter (B400 nm) have been fabricated in large numbers on refractory ceramic substrates by combining a novel powder processing approach with photoresist molds and an innovative lost-mold thermal process. The colloid and interfacial chemistry of the nanoscale zirconia particulates has been modeled and used to prepare highly concentrated suspensions. Engineering solutions to challenges in mold fabrication and casting have yielded free-standing, crack-free parts. Molds are fabricated using high-aspect-ratio photoresist on ceramic substrates. Green parts are formed using a rapid infiltration method that exploits the shear thinning behavior of the highly concentrated ceramic suspension in combination with gelcasting. The mold is thermally decomposed and the parts are sintered in place on the ceramic substrate. Chemically aided attrition milling disperses and concentrates the as-received 3Y-TZP powder to produce a dense, fine-grained sintered microstructure. Initial three-point bend strength data are comparable to that of conventional zirconia; however, geometric irregularities (e.g., trapezoidal cross sections) are present in this first generation and are discussed with respect to the distribution of bend strength.

Iterative process improvements have been used to eliminate strength-limiting geometric flaws in mesoscale bend bars composed of yttria-tetragonal zirconia polycrystals (Y-TZP). These improvements led to large quantities of high bend strength material. The metrology of Y-TZP mesoscale bend bars produced using a novel lost mold-rapid infiltration-forming process (LM-RIF) is characterized over several process improvements. These improvements eliminate trapezoidal cross sections in the parts, reduce concave upper surfaces in cross section, and minimize warping along the long axis of 332 × 26 × 17 μm mesoscale bend bars. The trapezoidal cross sections of earlier, first-generation parts were due to the absorption of high-energy ultraviolet (UV) light during the photolithographic mold-forming process, which produced nonvertical mold walls that the parts mirrored. The concave upper surfaces in cross section were eliminated by implementing a RIFbuffing process. Warping during sintering was attributed to impurities in the substrate, which creates localized grain growth and warping as the tetragonal phase becomes destabilized. Precision in the part dimensions is demonstrated using optical profilometry on bend bars and a triangular test component. The bend bar dimensions have a 95% confidence interval of < ±1 μm, and the tip radius of the triangular test component is 3 μm, consistent with the UV-photolithographic process used to form the mold cavities. The average bend strength of the mesoscale Y-TZP bend exceeds 2 GPa with a Weibull modulus equal to 6.3.

Contact-aided compliant cellular mechanisms are cellular structures designed with contact mechanisms integrated into each cell to provide stress relief. This article addresses compliant cellular structures having curved walls and internal contact mechanisms. The use of curved walls in cellular structures tends to improve their performance in terms of global strain capability and is beneficial for fabrication. In some cells, the addition of contact mechanisms results in stress relief, allowing the cells to be stretched farther than they could without contact. The cellular structures with curved walls are modeled, and finite element analysis is used to calculate the maximum global strains for comparable noncontact and contact-aided cells. An optimization procedure is performed to find the cell geometries that result in the highest global strains. Strains of up to 32.4% and 19.7% are predicted for the optimized curved noncontact and contact-aided cells, respectively. Additionally, a comparison of curved and noncurved, noncontact and contact-aided cells shows that the addition of curved walls results in a significantly greater improvement in global strains than that gained by adding a contact mechanism. Mesoscale contact-aided compliant cellular mechanism designs are fabricated via the lost mold–rapid infiltration forming process and are tested using a custom-designed test rig.

A novel fabrication process and design optimization method for a micro forceps is presented. This work is part of a larger research effort to design and fabricate nanoparticulate enabled surgical instruments. The micro forceps is a monolithic compliant mechanism that due to its two-dimensional design can be manufactured using the new fabrication process. The process begins with fabrication of an array of molds on refractory substrates using a modified UV lithography technique. In parallel, engineered ceramic nanocolloidal slurries are prepared for gel-casting into the molds. Mold infiltration takes place via a squeegee technique adapted from screen printing with excess slurry removed using an ethanol wipe. Finally, the photoresist molds are removed with a reactive ion etch (RIE) step, and ceramic parts sintered to full density. Employing this manufacturing technique for the compliant micro forceps design is advantageous because a large number of parts can be produced with a large aspect ratio (≥40:1), sharp edges (∼ 1 μm), and a resolution of 2 μm. Two optimization problems are formulated to determine the effect of dimensional parameters and material strength on the performance of the compliant micro forceps. First, performance is sensitive to small changes in the geometry, indicating that dimensions and shrinkage rates must be carefully controlled during processing. Second, performance can also be improved by using very large aspect ratios and/or improvements in material strength. A sample part manufactured using the new process is presented.