A previously described automated thin-film deposition system based on rf-magnetron sputtering could deposit quite complex optical multilayer systems with good precision and with no one in attendance [Sullivan and Dobrowolski, Appl. Opt. 32, 2351-2360 (1993)]. However, the deposition rate was slow, and the uniform area on the substrate was limited. We describe an ac-magnetron sputtering process in which the same deposition accuracy has been combined with significantly better film uniformity and a fivefold or sevenfold increase in the deposition rate. This makes the equipment of commercial interest. Experimental results are presented for several difficult coating problems.
Past research on all-dielectric nonpolarizing beam splitters is reviewed. It is shown that, for a 50-nm spectral region, it is possible to design and manufacture a two-material nonpolarizing plate beam splitter for use at an angle of 45 degrees (with a measured rms reflectance of 0.50 +/- 0.01 for both s- and p-polarized incident light).
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