Characterization of diamond-like carbon by Raman spectroscopy, XPS and optical constants

Mössner, C.; Grant, P. D.; Tran, Hue T.; Clarke, Glenn A.; Lockwood, D. J.; Labbé, H. J.; Mason, B.F.; Sproule, I.

doi:10.1016/s0040-6090(97)00630-5

Cited by 23 publications

(7 citation statements)

References 28 publications

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“…Since the structure of DLC films is extremely complex as carbon atoms can form bonds with three different types of hybridization, the properties of DLC films are largely determined by the relative proportion of sp 3 and sp 2 components in the films. Therefore, as an alternative to other techniques, such as electron energy loss spectroscopy (EELS) [14] and nuclear magnetic resonance (NMR) [15], XPS can be used to estimate the contents of sp 3 and sp 2 fractions. Indeed, it has been applied recently to both hydrogenated and nitrogenated carbon films [15][16][17][18].…”

Section: Effect On Sp 2 and Sp 3 Fractions In Dlc Filmsmentioning

confidence: 99%

“…Therefore, as an alternative to other techniques, such as electron energy loss spectroscopy (EELS) [14] and nuclear magnetic resonance (NMR) [15], XPS can be used to estimate the contents of sp 3 and sp 2 fractions. Indeed, it has been applied recently to both hydrogenated and nitrogenated carbon films [15][16][17][18]. However, one must note that XPS analysis gives no information on hydrogen content and the information of these bond ratio from XPS analysis should really be complimented by EELS measurements.…”

Section: Effect On Sp 2 and Sp 3 Fractions In Dlc Filmsmentioning

confidence: 99%

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The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

Zhao

Lemoine

Liu

et al. 2000

J. Phys.: Condens. Matter

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A small amount of silicon incorporation into diamond-like carbon (DLC) films prepared by plasma-enhanced chemical vapour deposition (PECVD) onto Al2O3:TiC substrates was studied by a combination of surface analysis and nanomechanical measurement techniques, namely XPS, Raman spectroscopy, nanoindentation and nanoscratch methods. Addition of silicon to the DLC films leads to an increase in the fraction of sp3, as deduced from XPS analysis, and a decrease in the Raman band intensity ratio ID/IG. Although the coated substrates exhibit better scratch resistance and lubricity, the films as deposited are softer than the Al2O3:TiC substrates. Upon silicon incorporation, the mechanical and tribological properties are degraded. Wear protection of the Al2O3:TiC substrate by DLC coating corresponds to the competition between the reduction in friction coefficient and the softening of the films. It is suggested that, for such a PECVD process, the degradation of the mechanical properties is caused by the increased hydrogen content in the deposits when silicon is incorporated, as is shown by the increased Raman spectral background slope. These tendencies are attributable to the development of polymer-like chains, which can weaken the inter-molecular structure of the films.

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Section: Effect On Sp 2 and Sp 3 Fractions In Dlc Filmsmentioning

confidence: 99%

Section: Effect On Sp 2 and Sp 3 Fractions In Dlc Filmsmentioning

confidence: 99%

The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

Zhao

Lemoine

Liu

et al. 2000

J. Phys.: Condens. Matter

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“…For the characterization of carbon films, various parameters and numerous experimental methods for their determination have been used [3][4][5][6][7][8][9]. Their efficient application in quality control and process optimization under industry-oriented conditions demands the applicability of real parts or at least of comparable reference substrates.…”

Section: Characterization Methodsmentioning

confidence: 99%

Structure and Characterization of Vacuum Arc Deposited Carbon Films—A Critical Overview

Schultrich

2022

Coatings

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This critical overview analyzes the relations between deposition conditions and structure for hydrogen-free carbon films, prepared by vacuum arc deposition. The manifold of film structures can be roughly divided into graphitic, nanostructured and amorphous films. Their detailed characterization uses advantageously sp3 fraction, density, Raman peak ratio and the mechanical properties (Young’s modulus and hardness). Vacuum arc deposition is based on energetic beams of carbon ions, where the film growth is mainly determined by ion energy and surface temperature. Both parameters can be clearly defined in the case of energy-selected carbon ion deposition, which thus represents a suitable reference method. In the case of vacuum arc deposition, the relation of the external controllable parameters (especially bias voltage and bulk temperature) with the internal growth conditions is more complex, e.g., due to the broad energy distribution, due to the varying “natural” ion energy and due to the surface heating by the ion bombardment. Nevertheless, some general trends of the structural development can be extracted. They are critically discussed and summarized in a hypothetical structural phase diagram in the energy-temperature plane.

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“…2(b) shows the rectifying ratio as a function of carbon lm thickness. In the 5 nm carbon lm case the recti-cation ratio is lowest (13) and it becomes highest (323) for the 30 nm carbon lm case. For a higher thickness of 100 nm the rectication ratio starts dropping (79) and it is still lower (14) in the case of a 500 nm thick carbon lm.…”

Section: Introductionmentioning

confidence: 96%

“…It shows two peaks which can be identied with the graphitic D and G bands. 13 The Raman spectrum thus conrms the formation of a graphitic carbon lm on a Si substrate prepared by PLD.…”

Section: Introductionmentioning

confidence: 99%

A back-to-back MOS–Schottky (Pt–SiO2–Si–C–Pt) nano-heterojunction device as an efficient self-powered photodetector: one step fabrication by pulsed laser deposition

et al. 2014

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Characterization of diamond-like carbon by Raman spectroscopy, XPS and optical constants

Cited by 23 publications

References 28 publications

The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

Structure and Characterization of Vacuum Arc Deposited Carbon Films—A Critical Overview

A back-to-back MOS–Schottky (Pt–SiO2–Si–C–Pt) nano-heterojunction device as an efficient self-powered photodetector: one step fabrication by pulsed laser deposition

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