In this paper, shunt capacitive RF microelectromechanical systems (MEMS) switches are developed in III-V technology using tantalum nitride (TaN) and tantalum pentoxide (Ta 2 O 5 ) for the actuation lines and the dielectric layers, respectively. A compositional, structural, and electrical characterization of the TaN and Ta 2 O 5 films is preliminarily performed, demonstrating that they are valid alternatives to the conventional materials used in III-V technology for RF MEMS switches. Specifically, it is found that the TaN film resistivity can be tuned from 0.01 to 30 Ω · cm by changing the deposition parameters. On the other hand, dielectric Ta 2 O 5 films show a low leakagecurrent density of few nanoamperes per square centimeter for E ∼ 1 MV/cm, a high breakdown field of 4 MV/cm, and a high dielectric constant of 32. The realized switches show good actuation voltages, in the range of 15-20 V, an insertion loss better than −0.8 dB up to 30 GHz, and an isolation of ∼ −40 dB at the resonant frequency, which is, according to bridge length, between 15 and 30 GHz. A comparison between the measured S-parameter values and the results of a circuit simulation is also presented and discussed, providing useful information on the operation of the fabricated switches. [2010-0236] Index Terms-Capacitive switches, RF microelectromechanical systems (MEMS), tantalum nitride (TaN), Ta 2 O 5 .
The paper describes a measurement device for obtaining the kinematic characterisation and isometric loading of ankle joints under different working conditions. Non-invasive, in vivo experiments can be conducted with this experimental apparatus, the potential of which could be usefully exploited in basic biomedical research, prosthesis design, clinical applications, sports medicine and rehabilitation. The device determines the 3D movement of the foot with respect to the shank and evaluates the torques and moments around the three articular axes in relation to any desired angular position of the ankle complex. When integrated with superficial electromyographic techniques and electrical stimulation, it allows the assessment of the functionality of the lower leg in both mechanical and myo-electrical terms. The paper reports the main mechanical and electronic features of the device (high linearity; maximum moment ranges +/- 300 Nm for flexion-extension, +/- 35 Nm for both pronation-supination and internal-external rotation; angular ranges: +/- 100 degrees of dorsi-plantar flexion, +/- 50 degrees of internal-external rotation and prono-supination; linear ranges: +/- 25 mm along each axis). Results from a healthy volunteer, under voluntary or stimulated conditions, helped in testing its operatability, reliability, robustness, repeatability and effectiveness. Preliminary simplified protocols have been also applied to 20 healthy volunteers, and the main results were 80.8 +/- 11.9 degrees of internalexternal rotation, 46.2 +/- 9.1 degrees of prono-supination and 74.6 +/- 13.1 degrees of flexion-extension. Torques and moments were normalised with respect to a body mass index of 30. The maximum plantar flexion moment (57.5 + 21.3 Nm) was measured with the foot at 150 of dorsal flexion; the maximum dorsal flexion moment (50.2 + 20.3 Nm) was measured with the foot at 150 of plantar flexion.
The charging of the dielectric used for the actuation in microelectromechanical system (MEMS) devices is one of the major failure sources for switches based on this technology. For this reason, a better understanding of such an effect is vital to improve the reliability for both ground and space applications. In this paper, the expected response of MEMS switches to unipolar and bipolar dc actuation voltages has been measured and modeled. Two configurations of MEMS switches, namely, an Ohmic series and a shunt capacitive one designed for microwave applications, have been studied as a test vehicle for charging effects related to the dc actuation pads. The recorded data have been interpreted mainly through the Poole–Frenkel effect due to charge injection when a high voltage is applied to the dielectric layer. Metal-Insulator-Metal (MIM) structures have been also considered as a complementary information for the response of the dielectric material.
A novel method proposed by Korea Atomic Energy Research Institute has been applied to the treatment of chloride salt wastes coming from electrorefining of spent nuclear fuel, which allows to separate uranium from fission products. It is based on a matrix, SAP (SiO2-Al2O3-P2O5), synthesized by a conventional sol-gel process, able to stabilize the volatile salt wastes due to the formation of metalaluminosilicates, metalaluminophosphates and metalphosphates. With this method a higher disposal efficiency and a lower waste volume can be obtained. Eutectic melt LiCl-KCl (59-41 mol%) has been used to simulate the waste salt. The composite SAP has been prepared by using tetraethyl ortosilicate (TEOS), aluminum chloride (AlCl3.6H2O) and phosphoric acid (H3PO4) as sources of Si, Al, and P, respectively. All reagents were dissolved in EtOH/H2O and the mixture, tightly sealed, was placed in an electric oven at 70 C. After a gelling/ageing for 3 days, the transparent hydrogels were dried at 110 C for 3 days and then thermally treated at 600 C for 2 hours. The final product (SAP) was reacted with metal chlorides at increasing temperatures for 20 hours inside an Argon-atmosphere glove-box, after mixing them at a SAP/metal chloride mixing ratio of 2. The obtained products have been characterized by means of density measurements, scanning electron microscopy, thermal analysis, as well as by XRD, FTIR and Raman spectra. Financial support from the Nuclear Fission Safety Program of the European Union (project SACSESS, contract FP7-CP-2012-323282) is gratefully acknowledged.
In this paper we present a novel process based on SU-8 technology for the fabrication of double clamped RF MEMS capacitive shunt switches in coplanar configuration. The key element of the exploited process is the MicroChem SU-8 2002 negative photoresist. The polymeric material is widely used in MEMS device processes because of its excellent thermal and chemical stability. In this paper, SU-8 polymer has been utilized in a double way to get suspended structures as double clamped beams: (i) SU-8 for the lateral supports, and (ii) as a sacrificial layer for the release of the suspended membrane. Preliminary RF tests on the manufactured switches have been done, and the measured electrical performances are in good agreement with the performed simulations
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