Room temperature sensing of hydrogen using randomly oriented tin oxide nanowires has been demonstrated successfully. The role of surface functionalization of nanowires with platinum catalyst in rapid hydrogen detection is also studied. These nanowires were successfully incorporated into a micro-electro-mechanical (MEMS) device. The device can successfully detect hydrogen gas (as low as 500 ppm) with response time as low as 10 sec. Effect of aspect ratio of the nanowires on diffusion of hydrogen molecules in the tin oxide nanowires is elucidated in detail.
This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C 4 F 8 plasma to form a conformal antiadhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.
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