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Articles you may be interested inPrinted array of thin-dielectric metal-oxide-metal (MOM) tunneling diodes Thermal infrared detection using dipole antenna-coupled metal-oxide-metal diodes J. Vac. Sci. Technol. B 27, 11 (2009); 10.1116/1.3039684 Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lensThe authors have designed a new procedure for fabrication of infrared ͑IR͒ sensors. These sensors consist of a dipole antenna coupled with a metal-oxide-metal ͑MOM͒ ͑Al-AlO x -Pt͒ diode. The surface of electron beam evaporated Al, serving as one of the electrodes, is cleaned using an Ar plasma, followed by in situ controlled growth of the tunneling oxide, AlO x . The antenna, its leads, and the overlap of the Al and Pt electrodes that defines the MOM overlap area are all defined using electron beam lithography. The MOM overlap area of these devices is as small as 50ϫ 80 nm 2 . Features of our process include the use of dissimilar metals for the formation of the MOM diode, small MOM diode size, and controlled etching and regrowth of the tunneling oxide. A CO 2 laser at 10.6 m was used for the IR characterization of these sensors. Current-voltage and IR measurements are presented. The normalized detectivity ͑D ‫ء‬ ͒ for these devices was found to be 2.13ϫ 10 6 cm Hz 1/2 W −1 .

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Unbiased, uncooled, and frequency-selective antenna-coupled nanowire thermocouples have been fabricated out of different metal combinations and characterized for infrared detection. The relative Seebeck coefficient of the nanowire thermocouples was measured with a characterization platform, which is colocated on the same chip as the detectors. The area of the hot junction of the nanowire thermocouple is approximately 75 nm × 75 nm. The antenna-coupled thermocouples show polarization dependence with a maximum normalized detectivity (D * ) of 1.94 × 10 5 cm · √ Hz/W.

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This paper reports a two-orders-of-magnitude improvement in the sensitivity of antenna-coupled nanothermocouple (ACNTC) infrared detectors. The electrical signal generated by on-chip ACNTCs results from the temperature difference between a resonant antenna locally heated by infrared radiation and the substrate. A cavity etched under the antenna provides two benefits. It eliminates the undesirable cooling of the hot junction by thermally isolating the antenna from the substrate. More importantly, careful cavity design results in constructive interference of the incident radiation reflected back to the antenna, which significantly increases the detector sensitivity. We present the cavity-depth-dependent response of ACNTCs with cavity depths between 1 μm and 22 μm. When constructive interference is maximized, the thermal response increases by 100-fold compared to devices without the cavity.